Patents by Inventor Sukai ZHU

Sukai ZHU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer cleaning equipment and cleaning method
    Patent number: 11869779
    Abstract: The present application provides a wafer cleaning equipment and a wafer cleaning method. During wafer cleaning operation, the landing position of a cleaning agent sprayed by a nozzle onto the surface of a wafer can be detected, and when the landing position produces a deviation, the measures of controlling a nozzle adjusting mechanism to adjust the position and/or spray angle of the nozzle, controlling a flow rate adjusting unit to adjust the flow rate of the cleaning agent sprayed by the nozzle, etc. are taken, so that the landing position of the cleaning agent sprayed by the nozzle onto the surface of the wafer is within a preset target region.
    Type: Grant
    Filed: June 30, 2021
    Date of Patent: January 9, 2024
    Assignee: CHANGXIN MEMORY TECHNOLOGIES, INC.
    Inventors: Sukai Zhu, YenTeng Huang
  • WAFER CLEANING EQUIPMENT AND CLEANING METHOD
    Publication number: 20230098666
    Abstract: The present application provides a wafer cleaning equipment and a wafer cleaning method. During wafer cleaning operation, the landing position of a cleaning agent sprayed by a nozzle onto the surface of a wafer can be detected, and when the landing position produces a deviation, the measures of controlling a nozzle adjusting mechanism to adjust the position and/or spray angle of the nozzle, controlling a flow rate adjusting unit to adjust the flow rate of the cleaning agent sprayed by the nozzle, etc. are taken, so that the landing position of the cleaning agent sprayed by the nozzle onto the surface of the wafer is within a preset target region.
    Type: Application
    Filed: June 30, 2021
    Publication date: March 30, 2023
    Inventors: Sukai ZHU, Yen Teng HUANG