Abstract: Optical axes of lens units of measurement heads are adjusted so as to be parallel to each other. The lens unit includes a diffraction lens. When adjusting the optical axis, in a state where the measurement heads face each other with a reference member interposed therebetween, light having a plurality of wavelengths are emitted from the measurement heads to one surface and the other surface of the reference member, respectively. Intensities of primary light having one wavelength, which are reflected by one surface and the other surface of the reference member respectively, and incident on the measurement heads through each of a path of a multi-order light having other wavelengths are displayed on a main display unit as information indicating a degree of orthogonality of the optical axes of the measurement heads with respect to the one surface and the other surface of the reference member.

Abstract: Optical axes of lens units of measurement heads are adjusted so as to be parallel to each other. The lens unit includes a diffraction lens. When adjusting the optical axis, in a state where the measurement heads face each other with a reference member interposed therebetween, light having a plurality of wavelengths are emitted from the measurement heads to one surface and the other surface of the reference member, respectively. Intensities of primary light having one wavelength, which are reflected by one surface and the other surface of the reference member respectively, and incident on the measurement heads through each of a path of a multi-order light having other wavelengths are displayed on a main display unit as information indicating a degree of orthogonality of the optical axes of the measurement heads with respect to the one surface and the other surface of the reference member.

Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception wavefor

Abstract: The confocal displacement sensor includes a light source for light projection configured to generate light having a plurality of wavelengths, a plurality of pinholes, an optical member configured to cause an axial chromatic aberration in the plurality of detection lights respectively emitted via the plurality of pinholes and converge the plurality of detection lights toward the measurement object, a spectroscope configured to respectively spectrally disperse, in the detection lights irradiated on the measurement object via the optical member, a plurality of detection lights respectively passed through the plurality of pinholes by being reflected while focusing on the measurement object and generate a plurality of light reception waveforms representing light reception intensities for each wavelength, and a measurement control section configured to statistically process the plurality of light reception waveforms and generate a representative light reception waveform from the plurality of light reception wavefor

Abstract: A contact displacement meter capable of performing an accurate displacement measurement where a movement speed of a contact is fast and having high resistance property to optical noise. A reference light passing regions are away from each other by a distance of a unique value in a movement scale. A peak position of the reference light passing region at which a received light signal of light passed through the reference light passing region takes a local maxim is detected, and an absolute position of the reference light passing region is specified based on the distance between the adjacent peak positions. A relative position of the reference light passing region with respect to a line sensor is specified based on a received light signal of light passed through a lattice region. A displacement of the contact is calculated based on the specified absolute position and the relative position.

Abstract: It is an object to provide a contact displacement meter capable of performing an accurate displacement measurement even in a case where a movement speed of a contact is fast, as well as having high resistance property to optical noise. A reference light passing regions are away from each other by a distance of a unique value in a movement scale. A peak position of the reference light passing region at which s received light signal of light passed through the reference light passing region takes a local maxim is detected, and an absolute position of the reference light passing region is specified based on the distance between the adjacent peak positions. A relative position of the reference light passing region with respect to a line sensor is specified based on a received light signal of light passed through a lattice region. A displacement of the contact is calculated based on the specified absolute position and the relative position.