Abstract: There is provided a micro-ejector. The micro-ejector according to an exemplary embodiment of the present invention may include an ejection device including a passage for ejecting fluid contained therein, and a piezoelectric actuator providing a driving force for ejecting fluid, a mounting plate including a passage for providing fluid to the ejection device formed therein, and a mounting groove on which the ejection device is mounted, and a connection member formed on the mounting plate, and adopted for connecting the piezoelectric actuator to an external power source.

Abstract: There are provided a micro-ejector and a method for manufacturing the same. The micro-ejector according to the present invention includes a passage plate including a barrier rib portion disposed in an upper space in a chamber and a protruding portion disposed in a lower space in the chamber and forming a passage in the same direction as a fluid discharging direction together with the barrier rib portion; and an actuator formed on the upper portion of the passage plate to correspond to the chamber and providing a driving force of discharging the fluid to the nozzle from the chamber.

Abstract: There is provided a fluid discharging device including: a first pressure generating unit generating a first pressure for discharging a fluid; a second pressure generating unit generating a second pressure for discharging a fluid, and being controllable so as to change a magnitude of the second pressure; and a nozzle discharging the fluid pressurized by the first and second pressure generating units.

Abstract: There is provided an apparatus for analyzing a biomaterial. The apparatus includes: a first substrate including a plurality of micro-pillars formed to protrude to a predetermined height, the biomaterial being attached to one surface of the micro-pillar; a second substrate including a plurality of micro-wells, the micro-pillars being insertable into the micro-wells when the first substrate-and the second substrate are combined with each other; and at least one spacer disposed between the first substrate and the second substrate when the first substrate and the second substrate are combined with each other.

Abstract: Disclosed herein is a cell chip including: an upper substrate having a plurality of biometrics spaced therefrom by fillers, the biometrics fixing a biomaterial thereinto; a first hydrophobic coating layer formed on the upper substrate; and a lower substrate combined with the upper substrate and having a plurality of wells formed therein, the well storing fluid provided to the biometrics therein. The cell chip includes two substrates functionally separated from each other to implement a three dimensional cell chip, solves a cross contamination problem, and provides a similar environment to a bio environment, thereby making it possible to increase the accuracy of a test.

Abstract: There is provided a micro-ejecting apparatus. The micro-ejecting apparatus includes: an ejector including a channel therein and a driving part for ejecting a fluid to the outside; a body including a plurality of mounting parts on which the ejector is mounted; and guiding members fixed on the body and corresponding to the plurality of mounting parts so as to determine the positions of the plurality of mounting parts in the body.

Abstract: There are provided a micro-ejector and a method of manufacturing the same. The micro-ejector includes an upper substrate including an inlet into which a fluid is drawn from the outside and a chamber groove; a lower substrate including a reservoir groove to provide a reservoir storing the fluid drawn through the inlet; a piezoelectric actuator formed on the upper substrate and supplying a driving force for fluid ejection to a chamber; and at least one support protruding from a bottom of the reservoir groove so as to support the upper substrate.

Abstract: There are disclosed a microfluidic ejection device and a method of manufacturing the same. The microfluidic ejection device includes a flow path plate having an inlet into which a microfluid is drawn, a pressure chamber connected with the inlet and having formed therein, a plurality of chamber units divided by a plurality of partitions, and a nozzle connected with the pressure chamber and ejecting the microfluid by integrating the microfluid, having passed through the plurality of chamber units, into a single flow path; and actuators formed on an upper portion of the flow path plate so as to respectively correspond to the plurality of chamber units and providing driving force for ejecting the microfluid from the pressure chamber to the nozzle. The microfluidic ejection device has superior microfluidic ejection performance because variations in pressure within the pressure chamber can be accurately adjusted.

Abstract: Disclosed is an inkjet printer. The inkjet printer in accordance with an embodiment of the present invention includes a supply channel coupled to a plurality of inkjet heads; a first main reservoir and a second main reservoir being coupled to either side of the supply channel; and a first press and a second press applying pressure to the inside of the first main reservoir and the second main reservoir, respectively.

Abstract: There is provided an ink path structure, including: a pressure chamber storing ink introduced thereinto to discharge the ink to a nozzle; and a path discharging the ink by pressure generated within the pressure chamber and then supplying the ink to the pressure chamber and being repeatedly expanded and contracted in a direction toward the pressure chamber to attenuate a residual pressure wave remaining in the pressure chamber.

Abstract: There is provided a micro-ejector. The micro-ejector according to an exemplary embodiment of the present invention may include an ejection device including a passage for ejecting fluid contained therein, and a piezoelectric actuator providing a driving force for ejecting fluid, a mounting plate including a passage for providing fluid to the ejection device formed therein, and a mounting groove on which the ejection device is mounted, and a connection member formed on the mounting plate, and adopted for connecting the piezoelectric actuator to an external power source.

Abstract: There are provided a micro-ejector and a method for manufacturing the same. The micro-ejector according to the present invention includes a passage plate including a barrier rib portion disposed in an upper space in a chamber and a protruding portion disposed in a lower space in the chamber and forming a passage in the same direction as a fluid discharging direction together with the barrier rib portion; and an actuator formed on the upper portion of the passage plate to correspond to the chamber and providing a driving force of discharging the fluid to the nozzle from the chamber.

Abstract: There is provided a method of manufacturing an inkjet head. A method of manufacturing an inkjet head according to an aspect of the invention may include: forming a piezoelectric actuator on a dummy substrate; cutting the piezoelectric actuator into head cell units of an inkjet head; preparing an inkjet head substrate including an ink chamber formed at a position corresponding to the piezoelectric actuator; bonding the dummy substrate and the inkjet head substrate to each other so that the piezoelectric actuator and the ink chamber correspond to each other; and removing the dummy substrate.

Abstract: There is provided a method of manufacturing an inkjet print head. The method includes providing a head portion having a dummy portion disposed on a surface of a pressure area pressurizing an ink chamber, a nozzle connected to the ink chamber for ink ejection and the ink chamber for ink supply to the nozzle, and removing the dummy portion. The method allows for the improvement of ink ejection and nozzle density. Also, the method allows for the forming of a thin-type head portion using the dummy portion.

Abstract: An ink-jet head is disclosed. The ink-jet head in accordance with an embodiment of the present invention is equipped with a plurality of jetting cells, each of which ejects ink. Each of the plurality of jetting cells is connected to a common reservoir supplying the ink, and a pillar is formed inside the common reservoir, in which the pillar supports an upper surface of the common reservoir by being extended from a lower surface to the upper surface of the common reservoir and the pillar disperses a pressure wave transferred inside the common reservoir.

Abstract: An inkjet print head includes a plurality of pressure chambers receiving and storing ink which is to be discharged to a nozzle, a piezoelectric body interposing a membrane with the pressure chamber, the piezoelectric body providing a driving force for discharging ink to each of the pressure chambers, and a measuring unit measuring capacitance of the piezoelectric body so that a temperature of ink being discharged to the nozzle is measured.

Abstract: There is provided an inkjet head and a manufacturing method thereof. The inkjet head includes an upper substrate formed of a silicon material and having an ink chamber storing ink provided therein; an intermediate substrate bonded to the upper substrate, formed of a low temperature co-fired ceramic material, and having a connection path and a restrictor provided therein while the connection path and the restrictor are connected to the ink chamber; and a lower substrate bonded to the intermediate substrate, formed of a silicon material, and having a nozzle connected to the connection path provided therein. According to the inkjet head and the manufacturing method thereof, the densification and facilitation of bonding between substrates are achieved by using anodic bonding between a silicon substrate and a ceramic substrate, thereby improving manufacturing yield.

Abstract: An electrostatic chuck and a substrate bonding device equipped with the electrostatic chuck are disclosed. The electrostatic chuck in accordance with an embodiment of the present invention includes: an elastic holder, in which a center portion of one surface of the elastic holder is formed in a convex shape; an electrode, which is coupled to the elastic holder such that the elastic holder is electrically charged; and a holding unit, which holds the other surface of the elastic holder. The electrostatic chuck in accordance with an embodiment of the present invention can prevent a defect caused by a void formed between substrates while bonding the substrates.

Abstract: Disclosed is an inkjet head. The inkjet head in accordance with an embodiment of the present invention can include a body in which a plurality of chambers divided by partitions are formed; a plurality of actuators coupled to one side of the body respectively such that pressure is supplied to each of the plurality of the chambers; and a fixture coupled to one side of the body in correspondence to a position of each of the partitions such that vibrations of the partitions are reduced.

Abstract: Disclosed is an inkjet printer. The inkjet printer in accordance with an embodiment of the present invention includes a supply channel coupled to a plurality of inkjet heads; a first main reservoir and a second main reservoir being coupled to either side of the supply channel; and a first press and a second press applying pressure to the inside of the first main reservoir and the second main reservoir, respectively.