Patents by Inventor Sumit Sachdeva

Sumit Sachdeva has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Flange and apparatus for processing substrates
    Patent number: 12243757
    Abstract: The disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. The flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. A material with a heat conductivity between 0.1 and 40 W/m K may be at least partially provided in between the cooling fluid and the rest of the flange.
    Type: Grant
    Filed: May 18, 2021
    Date of Patent: March 4, 2025
    Assignee: ASM IP Holding B.V.
    Inventors: Jeroen de Jonge, Sumit Sachdeva, Lucian Jdira, Julien Laurentius Antonius Maria Keijser, Theodorus G. M. Oosterlaken
  • FLANGE AND APPARATUS FOR PROCESSING SUBSTRATES
    Publication number: 20210366742
    Abstract: The disclosure relates to a flange for a process tube in an apparatus for processing substrates, e.g., a vertical furnace. The flange may be provided with an opening for in use giving access to the process chamber of the process tube and a cooling channel for allowing a cooling fluid to flow there through and cool the flange. A material with a heat conductivity between 0.1 and 40 W/m K may be at least partially provided in between the cooling fluid and the rest of the flange.
    Type: Application
    Filed: May 18, 2021
    Publication date: November 25, 2021
    Inventors: Jeroen de Jonge, Sumit Sachdeva, Lucian Jdira, Julien Laurentius Antonius Maria Keijser, Theodorus G.M. Oosterlaken