Patents by Inventor Sumner Sheff

Sumner Sheff has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of reducing defects on semiconductor wafers
    Patent number: 4885056
    Abstract: A reduction in the number of impurities and defects on a semiconductor wafer is provided by cleaning the wafer in a hydrochloric acid, hydrofluoric acid, and water solution. This HCl:HF:H.sub.2 O solution removes silicon dioxide as well as metallic impurities from the wafer surface, thus preventing the formation of defects on the wafer and increasing the quality and yield of semiconductor devices.
    Type: Grant
    Filed: July 12, 1989
    Date of Patent: December 5, 1989
    Assignee: Motorola Inc.
    Inventors: James B. Hall, Sumner Sheff