Patents by Inventor Sun Ae Jun

Sun Ae Jun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of etching an organic anti-reflective coating
    Patent number: 6039888
    Abstract: A method of etching an organic reflective coating which is suitable for minimizing the loss of a photoresist film and for improving the anisotropic etch profile is provided, including the steps of forming an organic anti-reflective coating on an etch layer, coating and patterning a photoresist material on the organic anti-reflective coating, and etching the organic anti-reflective coating in an O.sub.2 /CO plasma atmosphere.
    Type: Grant
    Filed: April 10, 1997
    Date of Patent: March 21, 2000
    Assignee: LG Semicon Co., Ltd.
    Inventors: Jae Hee Ha, Sun Ae Jun