Patents by Inventor Sun-E Park

Sun-E Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF IMPLANTING IMPURITIES AND METHOD OF MANUFACTURING A COMPLEMENTARY METAL OXIDE SEMICONDUCTOR (CMOS) IMAGE SENSOR USING THE SAME
    Publication number: 20120252155
    Abstract: In a method of doping impurities, an amorphous layer is formed on a substrate. Impurities are implanted through a top surface of the amorphous layer to form a first doping region at an upper portion of the substrate. The first doping region and the amorphous layer are transformed into a second doping region and a recrystallized layer, respectively, by a laser annealing process. The recrystallized layer is removed.
    Type: Application
    Filed: March 23, 2012
    Publication date: October 4, 2012
    Inventors: Sang-Jun CHOI, June-Mo Koo, Duck-Hyung Lee, Jong-Cheol Shin, Yu-Jin Ahn, Eun-Kyung Park, Sun-E Park
  • METAL INTERCONNECTION METHOD OF SEMICONDUCTOR DEVICE
    Publication number: 20110008957
    Abstract: A metal interconnection method of a semiconductor device includes forming a copper layer on a semiconductor substrate and planarizing the copper layer. Two thermal treatments are performed at different temperatures between formation of the copper layer and planarization of the copper layer.
    Type: Application
    Filed: June 30, 2010
    Publication date: January 13, 2011
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sun-E Park, Younghoon Park, Joocheol Han, Jinkuk Chung, Kiho Kang, Yu Jin Ahn