Patents by Inventor Sun Jae Lee

Sun Jae Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for rinsing and drying semiconductor substrates
    Publication number: 20070119486
    Abstract: A system for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.
    Type: Application
    Filed: January 26, 2007
    Publication date: May 31, 2007
    Inventors: Ki Hwan Park, Jong Kook Song, Mo Hyun Cho, Sung-Ho Cho, Sun Jae Lee, Pyung Ho Lim, Dong Wook Cho
  • Method of rinsing and drying semiconductor substrates
    Patent number: 7186299
    Abstract: A method for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.
    Type: Grant
    Filed: March 9, 2004
    Date of Patent: March 6, 2007
    Assignee: Samsung Electronics, Co., Ltd.
    Inventors: Ki Hwan Park, Jong Kook Song, Mo Hyun Cho, Sung-Ho Jo, Sun Jae Lee, Pyung Ho Lim, Dong Wook Cho
  • System for rinsing and drying semiconductor substrates and method therefor
    Publication number: 20050087211
    Abstract: A system and method for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.
    Type: Application
    Filed: March 9, 2004
    Publication date: April 28, 2005
    Inventors: Ki Hwan Park, Jong Kook Song, Mo Hyun Cho, Sung-Ho Cho, Sun Jae Lee, Pyung Ho Lim, Dong Wook Cho
  • Stiffened folded paperboard hanger
    Patent number: 5868289
    Abstract: A folded paperboard hanger including a slant plate part having two slant portions, a connecting plate part connecting end portions of the slant portions so as to make an approximate isosceles triangular formation, a hanging plate part formed as an one body together with the slant plate part for hanging the hanger, and a reinforcement plate part extended from one of the slant plate part and the connecting plate part. The reinforcement plate part is fixed by folding the reinforcement plate part so as to form an approximate right angle between the reinforcement plate part and the one of the slant plate part and the connecting plate part. An extending plate part is formed inside the connecting plate part and has a pair of hanging lugs. The extending plate part is folded by an angle of approximate 180 degrees such that the pair of hanging lugs are positioned at an opposite side of the hanging plate part with respect to the connecting plate part.
    Type: Grant
    Filed: September 18, 1996
    Date of Patent: February 9, 1999
    Inventor: Sun Jae Lee