Abstract: A method of recycling waste water is preferably provided in which hardness and gas are removed from the waste water. Additionally, salt and organic carbon are preferably removed from the waste water using high-efficiency reverse osmosis. The pH of the waste water can be controlled to optimize the processes. The recycled semiconductor waste water can then be made available for use as industrial water for performing a semiconductor fabrication process. As a result, a cost for manufacturing a semiconductor device may be reduced. The principles of the present invention also provide a more environmentally friendly manufacturing method, since it produces less semiconductor waste water when being performed than conventional methods.

Abstract: An apparatus and method for manufacturing deionized water is provided. Water is supplied to a first conduit. A plurality of reverse osmotic pressure vessels are connected to the first conduit. A filtering experimental vessel is connected to the first conduit, the filtering experimental vessel is separated from the plurality of reverse osmotic pressure vessels. A second conduit is connected to the plurality of reverse osmotic pressure vessels and the filtering experimental vessel for outputting the deionized water. A third conduit is connected to the plurality of reverse osmotic pressure vessels and the filtering experimental vessel for outputting concentrated ion water. The plurality of reverse osmotic pressure vessels and the filtering experimental vessel concurrently or independently separates the supplying water into the deionized water and the concentrated ion water.

Abstract: An apparatus and method for manufacturing deionized water is provided. Water is supplied to a first conduit. A plurality of reverse osmotic pressure vessels are connected to the first conduit. A filtering experimental vessel is connected to the first conduit, the filtering experimental vessel is separated from the plurality of reverse osmotic pressure vessels. A second conduit is connected to the plurality of reverse osmotic pressure vessels and the filtering experimental vessel for outputting the deionized water. A third conduit is connected to the plurality of reverse osmotic pressure vessels and the filtering experimental vessel for outputting concentrated ion water. The plurality of reverse osmotic pressure vessels and the filtering experimental vessel concurrently or independently separates the supplying water into the deionized water and the concentrated ion water.