Patents by Inventor Sun Q Jeon

Sun Q Jeon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for plasma processing and method for plasma processing
    Patent number: 8888950
    Abstract: There is provided a substrate supporter capable of securely supporting a substrate such as a wafer on which a device having a predetermined thin film pattern is formed to remove various impurities formed on the rear surface of the substrate, and a plasma processing apparatus having the same. The plasma processing apparatus includes: at least one arm; and a supporting portion extending from the arm toward a substrate seating position of the substrate, so that the plasma processing apparatus can reduce the likelihood of arc discharges compared with conventional dry etching to increase process yield and product reliability, and ensure stable mounting of a substrate.
    Type: Grant
    Filed: March 13, 2008
    Date of Patent: November 18, 2014
    Assignee: Charm Engineering Co., Ltd.
    Inventors: Kyung Ho Lee, Jae Ho Guahk, Jae Chul Choi, Young Ki Han, Hee Se Lee, Yong Hwan Lim, Kwan Goo Rha, Seng Hyun Chung, Sun Q Jeon, Jung Hee Lee
  • APPARATUS FOR PLASMA PROCESSING AND METHOD FOR PLASMA PROCESSING
    Publication number: 20100059478
    Abstract: There is provided a substrate supporter capable of securely supporting a substrate such as a wafer on which a device having a predetermined thin film pattern is formed to remove various impurities formed on the rear surface of the substrate, and a plasma processing apparatus having the same. The plasma processing apparatus includes: at least one arm; and a supporting portion extending from the arm toward a substrate seating position of the substrate, so that the plasma processing apparatus can reduce the likelihood of arc discharges compared with conventional dry etching to increase process yield and product reliability, and ensure stable mounting of a substrate.
    Type: Application
    Filed: March 13, 2008
    Publication date: March 11, 2010
    Inventors: Kyung Ho Lee, Jae Ho Guahk, Jae Choi, Young Ki Han, Hee Se Lee, Yong Hwan Lim, Kwan Goo Rha, Seng Hyun Chung, Sun Q Jeon, Jung Hee Lee