Patents by Inventor Sun Shangzhu

Sun Shangzhu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and Method for Forming Multi-Component Films
    Publication number: 20070248515
    Abstract: A system and a method for depositing films of a multi-component material by MOCVD utilizes a flash evaporator for providing vaporized reactant material at a high flow rate. The high flow rate enables film deposition to occur at a higher deposition rate that what is possible with conventional MOCVD systems. The system may be a single-chamber system or part of a multiple-chamber system. The multiple-chamber system allows multi-layer structures to be deposited and/or processed in situ.
    Type: Application
    Filed: December 1, 2004
    Publication date: October 25, 2007
    Inventors: Gary Tompa, Catherine Rice, Nick Sbrockey, Brent Hoerman, Lloyd Provost, Sun Shangzhu