Patents by Inventor Sun-woo Kawk

Sun-woo Kawk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Elevator system for transferring a wafer boat with automatic horizontal attitude control
    Patent number: 6223096
    Abstract: An elevator system automatically adjusts the inclination of a wafer boat during the manufacturing of semiconductor devices so that the wafers in the boat are maintained horizontal during their processing. The elevator system includes the wafer boat, a base on which the boat is supported, an elevator for loading the boat into a processing chamber and removing it from the chamber, a sensing unit for detecting the inclination of the boat relative to the horizontal, a horizontal control unit which is interposed between the base and the elevator and is drivable to maintain the boat in such a position that the wafers in the boat lie in horizontal planes, and a control unit for receiving information from the sensing unit and, based on the information, outputting a control signal to the horizontal control unit.
    Type: Grant
    Filed: September 1, 1998
    Date of Patent: April 24, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ki-huem Nam, Hyun Han, Sun-woo Kawk