Patents by Inventor SUNDARAPANDIAN REDDY

SUNDARAPANDIAN REDDY has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10199204
    Abstract: Embodiments of target retaining apparatus and substrate processing chambers incorporating same are provided herein. In some embodiments, a target retaining apparatus includes a housing including a first slot and a second slot; a cam movably disposed in the housing, wherein movement of the cam is constrained along the first slot; a retaining arm movably coupled to the cam, wherein movement of the retaining arm is constrained along the second slot; a linking member including a first end rotatably coupled to the cam and a second end rotatably coupled to the retaining arm; and a biasing element biasing the cam towards a first position in which the retaining arm extends away from the housing.
    Type: Grant
    Filed: January 20, 2015
    Date of Patent: February 5, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Srinivasa Yedla, Sundarapandian Reddy, Uday Pai, Kirankumar Savandaiah, Thanh X. Nguyen, Muhammad M. Rasheed, Jallepally Ravi
  • Publication number: 20150203960
    Abstract: Embodiments of target retaining apparatus and substrate processing chambers incorporating same are provided herein. In some embodiments, a target retaining apparatus includes a housing including a first slot and a second slot; a cam movably disposed in the housing, wherein movement of the cam is constrained along the first slot; a retaining arm movably coupled to the cam, wherein movement of the retaining arm is constrained along the second slot; a linking member including a first end rotatably coupled to the cam and a second end rotatably coupled to the retaining arm; and a biasing element biasing the cam towards a first position in which the retaining arm extends away from the housing.
    Type: Application
    Filed: January 20, 2015
    Publication date: July 23, 2015
    Inventors: SRINIVASA YEDLA, SUNDARAPANDIAN REDDY, UDAY PAI, KIRANKUMAR SAVANDAIAH, THANH X. NGUYEN, MUHAMMAD M. RASHEED, JALLEPALLY RAVI