Abstract: A rapid thermal heating system which includes a plurality of radiant energy sources to irradiate a predetermined area of a substrate. The radiant energy sources are associated with reflectors wherein portions of radiated areas of adjacent radiant energy sources overlap. The reflectors include a flared specular surface at their light emitting end or outlet. The flared specular surface reflects radiant energy toward the substrate.

Abstract: A rotation rate sensor that includes a closed-ended tuning fork which has a drive end base, a pickup end base, and a pair of tines. Each of the tines has a drive end and a pickup end with the drive ends of the tines being joined to the drive end base and the pickup ends of the tines being joined to the pickup end base. The rotation rate sensor also includes a drive circuit for generating a drive signal and drive electrodes disposed on each of the tines for applying the drive signal to the tines. The drive signal causes drive mode vibration of the tines. The drive mode vibration changes orientation when the tuning fork is rotated and causes pickup mode vibration of the tines. The rotation rate sensor further includes pickup electrodes disposed on each of the tines for picking up a pickup signal corresponding to the pickup mode vibration of the tines and a pickup circuit which is responsive to the pickup signal for generating a rate signal corresponding to the rate of rotation of the tuning fork.