Patents by Inventor Suneet Luniya

Suneet Luniya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Imaging performance optimization methods for semiconductor wafer inspection
    Patent number: 10785394
    Abstract: An inspection system may include an optical component configured to deliver inspection light to a subject and a detector configured to obtain an image of the subject based on the inspection light delivered to the subject. The inspection system may also include a processor in communication with the optical component and the detector. The processor may be configured to: measure an aberration of the optical component based on the image of the subject obtained by the detector; and adjust the optical component to compensate for a change in the aberration.
    Type: Grant
    Filed: July 11, 2016
    Date of Patent: September 22, 2020
    Assignee: KLA Corporation
    Inventors: Jeremy Nesbitt, Joshua Knight, Timothy Russin, Vadim Palshin, Suneet Luniya, Kevin Lai, Mike Murugan, Mark Bailey
  • Imaging Performance Optimization Methods for Semiconductor Wafer Inspection
    Publication number: 20170061597
    Abstract: Inspection systems and methods for adjusting/optimizing imaging performances of the inspection systems are disclosed. An inspection system may include an optical component configured to deliver inspection light to a subject and a detector configured to obtain an image of the subject at least partially based on the inspection light delivered to the subject. The inspection system may also include a processor in communication with the optical component and the detector. The processor may be configured to: measure an aberration of the optical component based on the image of the subject obtained by the detector; and adjust the optical component to compensate for a change in the aberration.
    Type: Application
    Filed: July 11, 2016
    Publication date: March 2, 2017
    Inventors: Jeremy Nesbitt, Josua Knight, Timothy Russin, Vadim Palshin, Suneet Luniya, Kevin Lai, Mike Murugan, Mark Bailey