Patents by Inventor Sung Bo LEE

Sung Bo LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing head, substrate processing apparatus including the same and processing method of substrate using the same
    Patent number: 11919122
    Abstract: A substrate processing apparatus includes: a conveyor belt configured to have an outer surface on which a bottom surface of a substrate is seated; and a polishing head unit configured to face an upper surface of the substrate, wherein the polishing head unit includes: a polishing head connected to a driver; a polishing pad configured to face the polishing head; a polishing pad fixing ring disposed between the polishing head and the polishing pad; and a temperature sensor configured to overlap the polishing pad fixing ring and to be spaced apart from the polishing pad fixing ring.
    Type: Grant
    Filed: September 29, 2020
    Date of Patent: March 5, 2024
    Assignees: SAMSUNG DISPLAY CO., LTD., KCTECH CO., LTD.
    Inventors: Seung Bae Kang, Sung Hyeon Park, Jung Gun Nam, Joon-Hwa Bae, Kyung Bo Lee, Keun Woo Lee, Woo Jin Cho, Byoung Kwon Choo
  • DISTANCE MEASUREMENT SENSOR WHICH DETECTS ERROR STATE IN ACCORDANCE WITH FOREIGN SUBSTANCE AND MOBILE ROBOT
    Publication number: 20220146649
    Abstract: The exemplary embodiments of the present disclosure provides a distance measurement sensor and a mobile robot which detect an abnormal state which is a foreign substance jamming or blocking state generated in a non-sensing area and a sensing area of the sensor by analyzing a degree of dispersion or a representative value of data varying during a detection time, to recognize an abnormal state of the sensor caused by the foreign substance in the outside or inside of the distance measurement sensor.
    Type: Application
    Filed: March 12, 2020
    Publication date: May 12, 2022
    Inventors: Seong Ju PARK, Byung Kwon MOON, Tae Young LEE, Myung Kyo JEONG, Sung Bo LEE, Chang Oh MUN, Sang Kyu LEE
  • Thin film structure and method of fabricating the same
    Patent number: 9337021
    Abstract: Provided are a thin film structure capable of remarkably reducing the defect density of gallium nitride (GaN), and a method of fabricating the same. The thin film structure includes a supporting substrate including sapphire, and an epilayer disposed on the supporting substrate and including gallium nitride (GaN). An upper part of the supporting substrate facing the epilayer includes a layer of sapphire into which silicon (Si) is diffused or ion-implanted through a top surface of the supporting substrate.
    Type: Grant
    Filed: February 18, 2014
    Date of Patent: May 10, 2016
    Assignee: SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION
    Inventors: Heung Nam Han, Sung Bo Lee
  • THIN FILM STRUCTURE AND METHOD OF FABRICATING THE SAME
    Publication number: 20150325658
    Abstract: Provided are a thin film structure capable of remarkably reducing the defect density of gallium nitride (GaN), and a method of fabricating the same. The thin film structure includes a supporting substrate including sapphire, and an epilayer disposed on the supporting substrate and including gallium nitride (GaN). An upper part of the supporting substrate facing the epilayer includes a layer of sapphire into which silicon (Si) is diffused or ion-implanted through a top surface of the supporting substrate.
    Type: Application
    Filed: February 18, 2014
    Publication date: November 12, 2015
    Inventors: Heung Nam HAN, Sung Bo LEE