Patents by Inventor Sung-Ki ROH

Sung-Ki ROH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for fabricating semiconductor chip by using multi-curing apparatus and multi-curing apparatus
    Patent number: 11532328
    Abstract: A multi-curing apparatus includes an actuator, a first chamber including a first energy source head, a second chamber including a second energy source head, a first driver including a first rotation transmission gear gear-engaged with the actuator, and a first driving gear gear-engaged with the first chamber. The apparatus further includes a second driver including a second rotation transmission gear gear-engaged with the actuator, and a second driving gear gear-engaged with the second chamber. The apparatus aligns a position of the first chamber with reference to a position of the second chamber while the first rotation transmission gear, the second rotation transmission gear, and the second driving gear are fixed.
    Type: Grant
    Filed: April 4, 2019
    Date of Patent: December 20, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Won Young Jee, Sung Ki Roh, Min Uk Kim, Sung Soo Kim, Woong Sik Nam, Sung-Gyu Park, Se Young Oh
  • METHOD FOR FABRICATING SEMICONDUCTOR CHIP BY USING MULTI-CURING APPARATUS AND MULTI-CURING APPARATUS
    Publication number: 20190351449
    Abstract: A multi-curing apparatus includes an actuator, a first chamber including a first energy source head, a second chamber including a second energy source head, a first driver including a first rotation transmission gear gear-engaged with the actuator, and a first driving gear gear-engaged with the first chamber. The apparatus further includes a second driver including a second rotation transmission gear gear-engaged with the actuator, and a second driving gear gear-engaged with the second chamber. The apparatus aligns a position of the first chamber with reference to a position of the second chamber while the first rotation transmission gear, the second rotation transmission gear, and the second driving gear are fixed.
    Type: Application
    Filed: April 4, 2019
    Publication date: November 21, 2019
    Inventors: WON YOUNG JEE, Sung Ki Roh, Min Uk Kim, Sung Soo Kim, Woong Sik Nam, Sung-Gyu Park, Se Young Oh
  • Method of inspecting a surface of a substrate and apparatus for performing the same
    Patent number: 9772296
    Abstract: In a method of inspecting a surface of a substrate, a first surface image of the substrate before loaded into a process chamber may be obtained. The first surface image may be processed to detect a defect on the surface of the substrate. Thus, the surfaces of all of the substrate may be inspected during a process may be performed without transferring the substrates.
    Type: Grant
    Filed: August 15, 2014
    Date of Patent: September 26, 2017
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Byung-Bok Kang, Seok-Min Kang, Bon-Ok Koo, Kyoung-Hwan Kim, Myung-Woo Kim, In-Gi Kim, Hyun-Chul Kim, Sung-Ki Roh, Gyung-Jin Min, Eun-Seok Lee, Jin-Suk Hong
  • METHOD OF INSPECTING A SURFACE OF A SUBSTRATE AND APPARATUS FOR PERFORMING THE SAME
    Publication number: 20150116698
    Abstract: In a method of inspecting a surface of a substrate, a first surface image of the substrate before loaded into a process chamber may be obtained. The first surface image may be processed to detect a defect on the surface of the substrate. Thus, the surfaces of all of the substrate may be inspected during a process may be performed without transferring the substrates.
    Type: Application
    Filed: August 15, 2014
    Publication date: April 30, 2015
    Inventors: Byung-Bok KANG, Seok-Min KANG, Bon-Ok KOO, Kyoung-Hwan KIM, Myung-Woo KIM, In-Gi KIM, Hyun-Chul KIM, Sung-Ki ROH, Gyung-Jin MIN, Eun-Seok LEE, Jin-Suk HONG