Patents by Inventor Sung-kyung Yun

Sung-kyung Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER TRANSFER ROBOT, METHOD OF CONTROLLING THE SAME, AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE SAME
    Publication number: 20160133502
    Abstract: A wafer transfer robot includes a robot transfer mechanism including a robot axis member and a robot arm member connected to the robot axis member, a robot hand connected to the robot arm member of the robot transfer mechanism and configured to transfer a wafer by using the robot transfer mechanism, a vertical displacement sensor installed in an upper side of the robot hand, and a plurality of horizontal displacement sensors installed in the upper side of the robot hand and separate from each other along a virtual line that is perpendicular to bilaterally symmetric axis of the robot hand.
    Type: Application
    Filed: September 30, 2015
    Publication date: May 12, 2016
    Inventors: Jung-min Won, Myoung-ho Jung, Byung-soo Moon, Sung-kyung Yun, Woo-kyu Lee