Patents by Inventor Sunglin WANG

Sunglin WANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fast fabrication of polymer out-of-plane optical coupler by gray-scale lithography
    Patent number: 11531270
    Abstract: A lithographic method for making an out-of-plane optical coupler includes forming a photoresist layer of positive photoresist material over a substrate. The positive photoresist layer undergoes a flood exposure to light through a binary mask to pattern a latent image of a mirror blank in the photoresist layer. A laser beam is scanned over the latent image of the mirror blank to apply controlled dosages of light at specified locations to form a latent image of a planar mirror surface that is oriented at a prescribed non-zero angle to a plane in which the substrate extends. The positive photoresist material is developed so that a remaining portion of the developed positive photoresist material forms an out-of-plane optical coupler having a planar mirror surface that is oriented at the prescribed angle.
    Type: Grant
    Filed: July 9, 2018
    Date of Patent: December 20, 2022
    Assignee: Arizona Board of Regents on Behalf of the University of Arizona
    Inventors: Yuzuru Takashima, Christopher R. Summitt, Sunglin Wang
  • FAST FABRICATION OF POLYMER OUT-OF-PLANE OPTICAL COUPLER BY GRAY-SCALE LITHOGRAPHY
    Publication number: 20200292943
    Abstract: A lithographic method for making an out-of-plane optical coupler includes forming a photoresist layer of positive photoresist material over a substrate. The positive photoresist layer undergoes a flood exposure to light through a binary mask to pattern a latent image of a mirror blank in the photoresist layer. A laser beam is scanned over the latent image of the mirror blank to apply controlled dosages of light at specified locations to form a latent image of a planar mirror surface that is oriented at a prescribed non-zero angle to a plane in which the substrate extends. The positive photoresist material is developed so that a remaining portion of the developed positive photoresist material forms an out-of-plane optical coupler having a planar mirror surface that is oriented at the prescribed angle.
    Type: Application
    Filed: July 9, 2018
    Publication date: September 17, 2020
    Applicant: Arizona Board of Regents on Behalf of the University of Arizona
    Inventors: Yuzuru TAKASHIMA, Christopher R. SUMMITT, Sunglin WANG