Abstract: The present disclosure relates to a system and method for continuously supplying negative ions using multi-pulsed plasma sources. The system includes a plurality of plasma generators each to generate plasma by applying pulsed power to the electronegative gas from a gas source; a negative ion supply unit connected to the plasma generators to receive the plasmas transferred therefrom and to continuously supply ions; and a controller connected to the plurality of plasma generators and configured to control characteristics of the pulsed powers delivered to the respective plasma generators and to adjust phase shift associated with the pulsed power envelopes. By adjusting the phase shift, the controller enables a plasma in one of the plasma generators to be in an after-glow state when a plasma in another plasma generator is in an active-glow state.

Abstract: According to one embodiment of the present disclosure, there is provided a capacitive coupler structure, including: power transmitters, each including a first metal plate and a second metal plate, and power receivers, each including a third metal plate and a fourth metal plate, where the first metal plate and the third metal plate form a first capacitor, the second metal plate and the fourth metal plate form a second capacitor, and each center of gravity of the first metal plate through the fourth metal plate is aligned on a single vertical line, and the first metal plate through the fourth metal plate form capacitive couplings.

Abstract: According to one embodiment of the present disclosure, there is provided a capacitive coupler structure, including: power transmitters, each including a first metal plate and a second metal plate, and power receivers, each including a third metal plate and a fourth metal plate, where the first metal plate and the third metal plate form a first capacitor, the second metal plate and the fourth metal plate form a second capacitor, and each center of gravity of the first metal plate through the fourth metal plate is aligned on a single vertical line, and the first metal plate through the fourth metal plate form capacitive couplings.

Abstract: The present disclosure relates to a system and method for continuously supplying negative ions using multi-pulsed plasma sources. The system includes a plurality of plasma generators each to generate plasma by applying pulsed power to the electronegative gas from a gas source; a negative ion supply unit connected to the plasma generators to receive the plasmas transferred therefrom and to continuously supply ions; and a controller connected to the plurality of plasma generators and configured to control characteristics of the pulsed powers delivered to the respective plasma generators and to adjust phase shift associated with the pulsed power envelopes. By adjusting the phase shift, the controller enables a plasma in one of the plasma generators to be in an after-glow state when a plasma in another plasma generator is in an active-glow state.