Abstract: There is provided a light source device for outputting an extreme ultraviolet light source based on an electron beam and a metal droplet, comprising: a chamber; an electron beam emission unit including a cathode electrode and a plurality of emitters, each of which contains a carbon-based material and which are arranged over the cathode electrode in such a manner as to be spaced apart from each other, the electron beam emission unit generating an electron beam within the chamber; an anode electrode positioned within the chamber, but in a manner that is spaced apart from the electron beam emission unit; and a droplet generation device injecting a metal droplet into a space between the electron beam emission unit and the anode electrode within the chamber, wherein, within the chamber, the metal droplet is ionized by the electron beam proceeding toward the anode electrode, thereby generating plasma, and extreme ultraviolet is generated from the plasma.

Abstract: There is provided a light source device according to one embodiment of the present disclosure for outputting an extreme ultraviolet light source based on an electron beam, comprising: a chamber; an electron beam emission unit including a cathode electrode and a plurality of emitters, each of which contains a carbon-based material and which are arranged over the cathode electrode in such a manner as to be spaced apart from each other, the electron beam emission unit generating an electron beam within the chamber; and an anode electrode positioned within the chamber, but in a manner that is spaced apart from the electron beam emission unit, and ionized upon incidence of the electron beam thereon, thereby generating plasma, wherein extreme ultraviolet is generated from the plasma.

Abstract: In the present invention, a molding process of keptops is performed by inserting a previously silk-printed thin film into a mold. Therefore, it is possible to implement a small sized and light product by connecting a plurality of keytops using a film, and a tactile feel of a user is increased. In addition, in the present invention, since a silk printing process is not required, the productivity of a keytop sheet is enhanced, and it is possible to decrease the defect rate of the product compared to the conventional art.