Patents by Inventor Sung-yeup Sa

Sung-yeup Sa has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus to treat a substrate
    Patent number: 8404080
    Abstract: An apparatus to treat a substrate includes a processing chamber including a reaction space where a substrate to be treated is placed and a plasma is formed, a ferrite core having a plurality of poles disposed outside the reaction space and a connector facing the reaction space across the plurality of poles and connecting the plurality of the poles each other, a coil winding around the plurality of poles, and an electric power unit supplying electric power to the coil.
    Type: Grant
    Filed: May 4, 2006
    Date of Patent: March 26, 2013
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sang-jean Jeon, Jong-rok Park, Sung-yeup Sa, Hee-jeon Yang, Guen-suk Lee
  • Apparatus to treat a substrate
    Publication number: 20070017446
    Abstract: An apparatus to treat a substrate includes a processing chamber including a reaction space where a substrate to be treated is placed and a plasma is formed, a ferrite core having a plurality of poles disposed outside the reaction space and a connector facing the reaction space across the plurality of poles and connecting the plurality of the poles each other, a coil winding around the plurality of poles, and an electric power unit supplying electric power to the coil.
    Type: Application
    Filed: May 4, 2006
    Publication date: January 25, 2007
    Inventors: Sang-jean Jeon, Jong-rok Park, Sung-yeup Sa, Hee-jeon Yang, Guen-suk Lee