Abstract: An apparatus for treating a substrate includes a chamber having a treatment space in which the substrate is treated, a substrate support unit that supports the substrate in the treatment space, a gas supply unit that supplies a gas into the treatment space, an exhaust line connected to the chamber, and a pressure-reducing member that reduces pressure in the exhaust line and releases process by-products generated in the treatment space. The exhaust line includes a first line connected to the chamber, a second line equipped with the pressure-reducing member, and a filter tube that connects the first line and the second line, and the filter tube has a corrugated side surface.

Abstract: The present invention relates to a shutter opening and closing an entrance of a process chamber, and a substrate processing apparatus including the same. The substrate processing apparatus of the present invention includes a process chamber which has a processing space and has an entrance provided at one side thereof to enter and exit a substrate, a substrate support unit which is provided in the processing space to support the substrate, a shutter which is provided in the entrance to open and close the entrance, and a plurality of shutter heaters which are provided in the shutter to transfer heat into the process chamber.

Abstract: An apparatus for treating a substrate includes a chamber having a treatment space in which the substrate is treated, a substrate support unit that supports the substrate in the treatment space, a gas supply unit that supplies a gas into the treatment space, an exhaust line connected to the chamber, and a pressure-reducing member that reduces pressure in the exhaust line and releases process by-products generated in the treatment space. The exhaust line includes a first line connected to the chamber, a second line equipped with the pressure-reducing member, and a filter tube that connects the first line and the second line, and the filter tube has a corrugated side surface.