Abstract: An apparatus for generating 3D shape data of a showerhead includes: a data processor that generates data sets comprising information indicating values of a first distance between an upper surface of a wafer and a showerhead, information indicating positions on the wafer and information about a fluid flow physical quantity value and determines a function representing a relationship among the various information; an input unit that receives condition data comprising a target fluid flow physical quantity value for each of the positions; and a database that stores information about the function. The data processor obtains information about a second distance, which has the target fluid flow physical quantity value, between the upper surface of the wafer and the showerhead at each of the positions, extracts spatial coordinate information of a lower surface of the showerhead, and generates 3D shape data of the showerhead using the spatial coordinate information.

Abstract: To reduce structure noise, input data representing an input structure is obtained and boundary conditions are set by classifying data of each of multiple structure elements of the input data as a signal component or a noise component. A smoothing operation is performed with respect to the input data and based on the boundary conditions. Output data representing an output structure is provided by reducing noise from the input structure.

Abstract: An apparatus for generating 3D shape data of a showerhead includes: a data processor that generates data sets comprising information indicating values of a first distance between an upper surface of a wafer and a showerhead, information indicating positions on the wafer and information about a fluid flow physical quantity value and determines a function representing a relationship among the various information; an input unit that receives condition data comprising a target fluid flow physical quantity value for each of the positions; and a database that stores information about the function. The data processor obtains information about a second distance, which has the target fluid flow physical quantity value, between the upper surface of the wafer and the showerhead at each of the positions, extracts spatial coordinate information of a lower surface of the showerhead, and generates 3D shape data of the showerhead using the spatial coordinate information.

Abstract: To reduce structure noise, input data representing an input structure is obtained and boundary conditions are set by classifying data of each of multiple structure elements of the input data as a signal component or a noise component. A smoothing operation is performed with respect to the input data and based on the boundary conditions. Output data representing an output structure is provided by reducing noise from the input structure.