Abstract: The present invention relates to a thin film deposition apparatus and a thin film deposition method in which the resistivity of a thin film is decreased by reducing the content of impurities inside a thin film. The thin film deposition apparatus may include a process chamber configured to perform a deposition process for causing a first metal and a reactant source to react, to form a thin film on a substrate; a source gas nozzle part configured to supply, into the process chamber, a source gas including the first metal and a ligand; a pretreatment gas nozzle part configured to supply, into the process chamber, a pretreatment gas including a second metal reactable with the ligand; and a reaction gas nozzle part configured to supply, into the process chamber, a reaction gas comprising the reactant source.

Abstract: The present disclosure relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus capable of blocking particles falling from a lower portion of a substrate to a surface of a lower substrate. The substrate processing apparatus in accordance with an exemplary embodiment may include a substrate boat including a plurality of hollow plates coupled to a plurality of rods in a multistage manner, wherein a plurality of substrates are respectively loaded on the plurality of hollow plates, a reaction tube having an accommodation space in which the substrate boat is accommodated, a gas supply part configured to supply a process gas into the reaction tube from one side of the reaction tube, and an exhaust part configured to exhaust a process residue in the reaction tube from the other side of the reaction tube. Each of the hollow plates may include an edge portion defining a hollow portion vertically passing therethrough.

Abstract: A device according to the embodiment of the present invention includes a display; a touch sensing unit; a pressure sensing unit capable of sensing a magnitude of a pressure at the touched position; and a control unit. The control unit performs a control operation when a pressure touch is sensed and a swipe gesture in which a touch point is moved is sensed and then the swipe gesture ends. The control operation may be one of termination of running applications, changing into a one-hand keyboard mode, deletion or transmission of an object, and movement of the object. According to the embodiment of the present invention, the operability of the device is enhanced. According to the embodiment, it is possible to easily terminate running applications by using one finger even without using a separate home button.

Abstract: The present disclosure relates to a substrate treatment apparatus and a substrate treatment method, and more particularly, to a substrate treatment apparatus and a substrate treatment method configured to deposit a uniform thin film on a substrate. A substrate treatment apparatus, in accordance with an exemplary embodiment, includes a reaction tube having an internal space formed therein, a substrate boat configured to load a plurality of substrates in multi-stages, and positioned in the internal space to partition a plurality of treatment spaces in which the plurality of substrates are respectively treated, a process gas supply part configured to supply a process gas to the plurality of treatment spaces, and a dilution gas supply part configured to supply a dilution gas for diluting the process gas within the plurality of treatment spaces.

Abstract: Provided is a substrate processing apparatus, and more particularly, a batch-type substrate processing apparatus where processes can be performed independently on a plurality of substrates. The substrate processing apparatus includes a substrate boat including a plurality of partition plates and a plurality of connection rods, an internal reaction tube, a gas supply unit, and an exhaust unit, and a plurality of substrates are loaded to be separated from the partition plates.

Abstract: A graphical user interface is generated at a mobile communication terminal having a first touch screen of a first size, the graphical user interface including one or more touch screen input options. The generated graphical user interface is transmitted from the mobile communication terminal and to a vehicle communication terminal having a second touch screen of a second size. An indication of touch screen input received at the second touch screen of the vehicle communication terminal is received at the mobile communication terminal and from the vehicle communication terminal. A function corresponding to the touch screen input received at the second touch screen of the vehicle communication terminal is executed at the mobile communication terminal.

Abstract: The present disclosure relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus capable of blocking particles falling from a lower portion of a substrate to a surface of a lower substrate. The substrate processing apparatus in accordance with an exemplary embodiment may include a substrate boat including a plurality of hollow plates coupled to a plurality of rods in a multistage manner, wherein a plurality of substrates are respectively loaded on the plurality of hollow plates, a reaction tube having an accommodation space in which the substrate boat is accommodated, a gas supply part configured to supply a process gas into the reaction tube from one side of the reaction tube, and an exhaust part configured to exhaust a process residue in the reaction tube from the other side of the reaction tube. Each of the hollow plates may include an edge portion defining a hollow portion vertically passing therethrough.

Abstract: Disclosed is a substrate processing apparatus comprising: a chamber which provides a substrate processing space; a process gas supply line which is for supplying a process gas into the chamber; a first diffusion plate which has formed on an edge portion thereof an injection hole for injecting the process gas; a substrate support which faces the first diffusion plate and is for supporting a substrate; a second diffusion plate which is provided between the first diffusion plate and the substrate support and has formed thereon a plurality of distribution holes; and a plasma generation unit which is for forming plasma in the space between the first diffusion plate and the second diffusion plate.

Abstract: A graphical user interface is generated at a mobile communication terminal having a first touch screen of a first size, the graphical user interface including one or more touch screen input options. The generated graphical user interface is transmitted from the mobile communication terminal and to a vehicle communication terminal having a second touch screen of a second size. An indication of touch screen input received at the second touch screen of the vehicle communication terminal is received at the mobile communication terminal and from the vehicle communication terminal. A function corresponding to the touch screen input received at the second touch screen of the vehicle communication terminal is executed at the mobile communication terminal.

Abstract: Provided is a substrate processing apparatus, and more particularly, a batch-type substrate processing apparatus where processes can be performed independently on a plurality of substrates. The substrate processing apparatus includes a substrate boat including a plurality of partition plates and a plurality of connection rods, an internal reaction tube, a gas supply unit, and an exhaust unit, and a plurality of substrates are loaded to be separated from the partition plates.

Abstract: A graphical user interface is generated at a mobile communication terminal having a first touch screen of a first size, the graphical user interface including one or more touch screen input options. The generated graphical user interface is transmitted from the mobile communication terminal and to a vehicle communication terminal having a second touch screen of a second size. An indication of touch screen input received at the second touch screen of the vehicle communication terminal is received at the mobile communication terminal and from the vehicle communication terminal. A function corresponding to the touch screen input received at the second touch screen of the vehicle communication terminal is executed at the mobile communication terminal.

Abstract: A graphical user interface is generated at a mobile communication terminal having a first touch screen of a first size, the graphical user interface including one or more touch screen input options. The generated graphical user interface is transmitted from the mobile communication terminal and to a vehicle communication terminal having a second touch screen of a second size. An indication of touch screen input received at the second touch screen of the vehicle communication terminal is received at the mobile communication terminal and from the vehicle communication terminal. A function corresponding to the touch screen input received at the second touch screen of the vehicle communication terminal is executed at the mobile communication terminal.

Abstract: A graphical user interface is generated at a mobile communication terminal having a first touch screen of a first size, the graphical user interface including one or more touch screen input options. The generated graphical user interface is transmitted from the mobile communication terminal and to a vehicle communication terminal having a second touch screen of a second size. An indication of touch screen input received at the second touch screen of the vehicle communication terminal is received at the mobile communication terminal and from the vehicle communication terminal. A function corresponding to the touch screen input received at the second touch screen of the vehicle communication terminal is executed at the mobile communication terminal.

Abstract: A navigation method and apparatus of a mobile terminal displays only a particular point of interest (POI) existing by the roadside of a pre-set route when the POI is selected by the user, to thereby provide the user-selected POI without changing the route (or without re-searching the route). The navigation apparatus of a mobile terminal includes a display unit configured to display a route from a current location to a destination on map data, and a controller configured to search a first point of interest (POI) among the first POI located by the roadside of the route and a second POI located near the route, and display location information of the searched first POI on the display unit.

Abstract: Techniques are described for allowing a user to intuitively check an actual image captured by a camera, rather than to recognize information regarding a peripheral area (point of interest) on a map. An apparatus includes a camera module that accesses an image captured by a camera and detects a direction in which the camera points and a display unit that displays the captured image. The apparatus also includes a controller that detects a position of a point of interest (POI) corresponding to a keyword and indicates location information for the POI on the displayed image based on the direction information of the to camera, a current location, and the detected location of the POI.

Abstract: A navigation method and apparatus of a mobile terminal displays only a particular point of interest (POI) existing by the roadside of a pre-set route when the POI is selected by the user, to thereby provide the user-selected POI without changing the route (or without re-searching the route). The navigation apparatus of a mobile terminal includes a display unit configured to display a route from a current location to a destination on map data, and a controller configured to search a first point of interest (POI) among the first POI located by the roadside of the route and a second POI located near the route, and display location information of the searched first POI on the display unit.

Abstract: A method and apparatus for receiving current location information; extracting photo images associated with areas selected by a user from map data, reading image capture location information from the extracted photo images, and calculating a route by way of the image captured locations of the extracted photo images based on the current location information and the read image capture location information; and outputting the route.

Abstract: A graphical user interface is generated at a mobile communication terminal having a first touch screen of a first size, the graphical user interface including one or more touch screen input options. The generated graphical user interface is transmitted from the mobile communication terminal and to a vehicle communication terminal having a second touch screen of a second size. An indication of touch screen input received at the second touch screen of the vehicle communication terminal is received at the mobile communication terminal and from the vehicle communication terminal. A function corresponding to the touch screen input received at the second touch screen of the vehicle communication terminal is executed at the mobile communication terminal.

Abstract: Techniques are described for allowing a user to intuitively check an actual image captured by a camera, rather than to recognize information regarding a peripheral area (point of interest) on a map. An apparatus includes a camera module that accesses an image captured by a camera and detects a direction in which the camera points and a display unit that displays the captured image. The apparatus also includes a controller that detects a position of a point of interest (POI) corresponding to a keyword and indicates location information for the POI on the displayed image based on the direction information of the to camera, a current location, and the detected location of the POI.