Patents by Inventor Sung Hun JANG

Sung Hun JANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
    Publication number: 20230170232
    Abstract: A manufacturing apparatus for a semiconductor device, the manufacturing apparatus including a spin chuck configured to fix and rotate a wafer; a nozzle configured to spray a chemical toward the wafer; a lateral displacement sensor configured to measure a displacement variation to a lateral surface of the wafer while the spin chuck is rotating; and a controller configured to control a position of the nozzle by using the displacement variation while the spin chuck is rotating.
    Type: Application
    Filed: January 26, 2023
    Publication date: June 1, 2023
    Inventors: Kyoung Whan OH, Kyung-Won KANG, Hyeon Jun KANG, Ju Bong LEE, Sung Hun JANG, Seok HEO, Hyun Woong HWANG
  • MANUFACTURING APPARATUS FOR SEMICONDUCTOR DEVICE
    Publication number: 20200411346
    Abstract: A manufacturing apparatus for a semiconductor device, the manufacturing apparatus including a spin chuck configured to fix and rotate a wafer; a nozzle configured to spray a chemical toward the wafer; a lateral displacement sensor configured to measure a displacement variation to a lateral surface of the wafer while the spin chuck is being rotated; and a controller configured to control a position of the nozzle by using the displacement variation while the spin chuck is being rotated.
    Type: Application
    Filed: December 26, 2019
    Publication date: December 31, 2020
    Inventors: Kyoung Whan OH, Kyung-Won KANG, Hyeon Jun KANG, Ju Bong LEE, Sung Hun JANG, Seok HEO, Hyun Woong HWANG