Patents by Inventor Sungjun ANN

Sungjun ANN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma etching apparatus, plasma etching method, and semiconductor device fabrication method including the plasma etching method
    Patent number: 11658039
    Abstract: Disclosed are plasma etching apparatuses, plasma etching methods, and semiconductor device fabrication methods. The plasma etching apparatus comprises a chamber, an electrostatic chuck in a lower portion of the chamber, a radio-frequency power supply that has a connection with the electrostatic chuck and provides the electrostatic chuck with a radio-frequency power to generate a plasma in the chamber, and a controller that has a connection with the radio-frequency power supply and controls the radio-frequency power.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: May 23, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Kyuho Kim, Nam Kyun Kim, Sungjun Ann, Myungsun Choi, Dougyong Sung, Seungbo Shim
  • PLASMA ETCHING APPARATUS, PLASMA ETCHING METHOD, AND SEMICONDUCTOR DEVICE FABRICATION METHOD INCLUDING THE PLASMA ETCHING METHOD
    Publication number: 20220020597
    Abstract: Disclosed are plasma etching apparatuses, plasma etching methods, and semiconductor device fabrication methods. The plasma etching apparatus comprises a chamber, an electrostatic chuck in a lower portion of the chamber, a radio-frequency power supply that has a connection with the electrostatic chuck and provides the electrostatic chuck with a radio-frequency power to generate a plasma in the chamber, and a controller that has a connection with the radio-frequency power supply and controls the radio-frequency power.
    Type: Application
    Filed: July 8, 2021
    Publication date: January 20, 2022
    Inventors: KYUHO KIM, Nam Kyun KIM, Sungjun ANN, MYUNGSUN CHOI, DOUGYONG SUNG, SEUNGBO SHIM