Abstract: The present disclosure relates to an apparatus for collecting reaction by-products for semiconductor processes through pyrolysis in a high-temperature region and an oxidation reaction in a low-temperature region, and an object of the present disclosure is to provide an apparatus for collecting reaction by-products, which is capable of collecting powdered oxides grown from High K materials by inducing an oxidation reaction in a box-shaped collection part having a low-temperature region formed by a cooling pad part after thermally decomposing the High K material at a high temperature of a heater in an inlet port of the collection apparatus when High K deposition precursors, which are supplied to a process chamber for an oxidation process for depositing a semiconductor dielectric film with the High K material having high permittivity in order to miniaturize a semiconductor circuit, are discharged together with exhaust gas.

Abstract: An autonomous driving system may be capable of performing autonomous navigation adjustments using different maps. A user may input, on a first map, a departure point and/or a destination point. The autonomous vehicle may be configured to generate a first route using the departure point. The autonomous vehicle may initiate travel along a second route matching the first route using a different map. Based on collecting surrounding information on the second route and/or traffic information on the second route, the autonomous vehicle may be re-routed to travel along a third route.

Abstract: An automated valet parking method includes: when charging of an electric vehicle is needed, performing: i) before providing a parking space to the electric vehicle, guiding, by a parking infrastructure, the electric vehicle to autonomously drive to a charging service zone, and ii) after charging of the electric vehicle is completed in the charging service zone, guiding, by the parking infrastructure, the electric vehicle to autonomously drive from the charging service zone to a first empty parking space in the parking lot. In particular, guiding the electric vehicle to the charging service zone before providing a parking space to the electric vehicle comprises: setting an empty space in the charging service zone as a first target position; and transmitting to the electric vehicle the first target position and a first guide route that guides the electric vehicle to the empty space in the charging service zone.

Abstract: A vehicle control device includes a processor and memory. The processor may determine, based on a first map, a global path along which a vehicle is to travel, determine, based on a second map associated with the global path and while the vehicle is traveling along the global path, a plurality of local paths associated with the global path, wherein the second map has higher precision than the first map, select, based on a comparison between a plurality of coordinates of the global path and a plurality of coordinates of the plurality of local paths, at least one local path of the plurality of local paths, and control, based on the at least one precise local path, the vehicle.

Abstract: Disclosed is a process stop loss reduction system, in which in case that pressure in a trapping apparatus and pressure in a process chamber are increased because of space clogging or the like caused by reaction by-products while the trapping apparatus for trapping of a reaction by-product contained in exhaust gas discharged from the process chamber operates over a long period of time during a semiconductor process, only the trapping apparatus, to which a supply of exhaust gas is cut off, may be quickly replaced while inert gas is received in an idle state and continuously supplied to a vacuum pump through a bypass pipe of the trapping apparatus without stopping an operation of (shutting down) a semiconductor manufacturing process chamber facility, and then the trapping apparatus may be supplied with the exhaust gas again.

Abstract: A pellicle cleaning method includes loading a pellicle on a first surface of a stage, rotating the stage about an axis parallel to the first surface, electrifying a tip; and removing particles from the pellicle, wherein removing of the particles from the pellicle includes pushing of the particles on the pellicle with the electrified tip.

Abstract: An embodiment is an autonomous driving system in a heterogeneous SD map and precise map environment, which can provide an autonomous driving service using a heterogeneous SD map having properties that do not match those of a precise map. The autonomous driving system in a heterogeneous SD map and HD map environment includes a service platform and an autonomous vehicle, and the operation and operation method of the system depend on whether a user can input TBT in addition to a start point and a destination.

Abstract: The present disclosure relates to an apparatus for collecting reaction by-products for semiconductor processes through pyrolysis in a high-temperature region and an oxidation reaction in a low-temperature region, and an object of the present disclosure is to provide an apparatus for collecting reaction by-products, which is capable of collecting powdered oxides grown from High K materials by inducing an oxidation reaction in a box-shaped collection part having a low-temperature region formed by a cooling pad part after thermally decomposing the High K material at a high temperature of a heater in an inlet port of the collection apparatus when High K deposition precursors, which are supplied to a process chamber for an oxidation process for depositing a semiconductor dielectric film with the High K material having high permittivity in order to miniaturize a semiconductor circuit, are discharged together with exhaust gas.

Abstract: An autonomous driving apparatus and a method for generating a precise map using the autonomous driving apparatus are configured to vary an application ratio of interpolation to precise map data to be stored depending on an accident risk on a corresponding road and a distance from a host vehicle during driving so as to optimize the precise map data to be stored. The autonomous driving apparatus includes an accident risk classification unit configured to vary the application ratio of interpolation to data and whether or not to store data acquired by applying interpolation to the data depending on the accident risk on the corresponding road and the distance from the host vehicle during driving, and an autonomous driving controller configured to generate the precise map data depending on the accident risk classification unit.

Abstract: Disclosed is a process stop loss reduction system, in which in case that pressure in a trapping apparatus and pressure in a process chamber are increased because of space clogging or the like caused by reaction by-products while the trapping apparatus for trapping of a reaction by-product contained in exhaust gas discharged from the process chamber operates over a long period of time during a semiconductor process, only the trapping apparatus, in which an exhaust gas supply flow path is blocked, may be quickly replaced while inert gas, instead of the exhaust gas, is received in an idle state and continuously supplied to the vacuum pump through a bypass pipe without stopping an operation of (shutting down) a semiconductor manufacturing process chamber facility, and then the trapping apparatus may be supplied with the exhaust gas again as the flow path is changed.

Abstract: An automated parking system and a method enable a driverless vehicle to autonomously travel and park in a vacant parking slot through communication with a parking infrastructure. The automated parking system and method also control the driverless vehicle to autonomously travel from a parking slot to a pickup area through communication with the parking infrastructure.

Abstract: An autonomous driving system, in a heterogeneous SD map and HD map environment, may include a service platform configured to transmit, to an autonomous vehicle, a departure point and a destination point input from a user by use of a first map, and the autonomous vehicle configured to generate a first route using the departure point, the destination point, and a second map, and generate a second route matching the first route using a third map, according to a preset program, wherein the autonomous vehicle is configured to determine whether to generate a third route by collecting surrounding information on the second route and traffic information on the second route provided from an external server, during autonomous driving along the second route, and set the third route corresponding to a determined result value obtained by the determining by use of a first by use of a first surrounding information.

Abstract: The present disclosure relates to an apparatus for trapping a reaction by-product created by an etching process, the apparatus being configured to trap a reaction by-product contained in an unreacted gas discharged after a process is performed in an etching process chamber during a semiconductor manufacturing process, trap and stack the reaction by-product in the form of powder at a position between a vacuum pump and a scrubber through multiple flow path switching structures, multiple trapping structures, and multiple stacking structures, and discharge only a gaseous unreacted gas to the scrubber.

Abstract: Disclosed is a process stop loss reduction system, in which in case that pressure in a trapping apparatus and pressure in a process chamber are increased because of space clogging or the like caused by reaction by-products while the trapping apparatus for trapping of a reaction by-product contained in exhaust gas discharged from the process chamber operates over a long period of time during a semiconductor process, only the trapping apparatus, in which an exhaust gas supply flow path is blocked, may be quickly replaced while inert gas, instead of the exhaust gas, is received in an idle state and continuously supplied to the vacuum pump through a bypass pipe without stopping an operation of (shutting down) a semiconductor manufacturing process chamber facility, and then the trapping apparatus may be supplied with the exhaust gas again as the flow path is changed.

Abstract: An autonomous driving system, in a heterogeneous SD map and HD map environment, may include a service platform configured to transmit, to an autonomous vehicle, a departure point and a destination point input from a user by use of a first map, and the autonomous vehicle configured to generate a first route using the departure point, the destination point, and a second map, and generate a second route matching the first route using a third map, according to a preset program, wherein the autonomous vehicle is configured to determine whether to generate a third route by collecting surrounding information on the second route and traffic information on the second route provided from an external server, during autonomous driving along the second route, and set the third route corresponding to a determined result value obtained by the determining by use of a first by use of a first surrounding information.

Abstract: A group pairing method of a wireless intercom system according to an aspect includes: scanning, by a mobile device wirelessly connected to a master wireless intercom device, QR codes displayed on mobile devices respectively wirelessly connected to a plurality of slave wireless intercom devices to add the plurality of slave wireless intercom devices to an intercom group as members (‘intercom group members’); setting a connection order of the intercom group members by using the mobile device wirelessly connected to the master wireless intercom device; and wirelessly chain-connecting the plurality of slave wireless intercom devices to the master wireless intercom device according to the set connection order.

Abstract: Disclosed is a process stop loss reduction system, in which in case that pressure in a trapping apparatus and pressure in a process chamber are increased because of space clogging or the like caused by reaction by-products while the trapping apparatus for trapping of a reaction by-product contained in exhaust gas discharged from the process chamber operates over a long period of time during a semiconductor process, only the trapping apparatus, to which a supply of exhaust gas is cut off, may be quickly replaced while inert gas is received in an idle state and continuously supplied to a vacuum pump through a bypass pipe of the trapping apparatus without stopping an operation of (shutting down) a semiconductor manufacturing process chamber facility, and then the trapping apparatus may be supplied with the exhaust gas again.

Abstract: A group pairing method of a wireless intercommunication system according to an embodiment may comprise the steps of: acquiring information about slave wireless intercommunication devices and generating a pairing list from the acquired information, and sorting the generated list according to a chain connection order; transmitting information about the sorted pairing list and chain connection order to a master wireless intercommunication device; the master wireless intercommunication device receiving the information about the sorted pairing list and chain connection order from the master mobile device and updating the pairing list thereof from the received pairing list, and transmitting information about the updated pairing list and chain connection order to the slave wireless intercommunication devices; and each of the slave wireless intercommunication devices receiving the information about the updated pairing list and chain connection order from the master wireless intercommunication device and updating the

Abstract: An automated parking system and a method enables a vehicle to autonomously travel to and parks in a vacant parking slot based on communication with a parking infrastructure. In addition, the automated parking system and method for a driverless vehicle is capable of autonomously traveling from a parking slot to a pickup area via communication with the parking infrastructure.

Abstract: An automated parking system and a method enable a driverless vehicle to autonomously travel and park in a vacant parking slot through communication with a parking infrastructure. The automated parking system and method also control the driverless vehicle to autonomously travel from a parking slot to a pickup area through communication with the parking infrastructure.