Abstract: A polishing control device according to various example embodiments can be a polishing control device, comprising a head configured to mount a substrate, a platen facing the head with the substrate in between, a source in at least one of the head or the platen configured to generate a signal, a sensor configured to detect the signal transmitted through the substrate, the sensor being opposite the source and in at least one of the platen or the head and facing the source, and a controller configured to analyze the signal detected by the sensor and control the polishing of the substrate.

Abstract: Provided is a plasma processing apparatus. The plasma processing apparatus includes a chamber where a wafer is configured to be mounted, a source power configured to provide a source voltage to generate a plasma in the chamber, a multi-level pulse circuit configured to generate a wafer voltage to accelerate ions in the plasma, and generate a pulse signal including a first pulse voltage, a second pulse voltage having a level lower than the first pulse voltage, and a third pulse voltage different from the first and second pulse voltages and having a level higher than the second pulse voltage, which are sequentially output, and an arbitrary voltage compensation circuit configured to provide a compensation voltage non-linearly changed to at least one of the first to third pulse voltages.

Abstract: A method of processing a substrate is provided. The method includes providing the substrate on a stage of a substrate processing apparatus; and processing the substrate on the stage. The processing of the substrate includes: providing source power to the substrate processing apparatus; and providing bias power to the substrate processing apparatus. The providing of the bias power to the substrate processing apparatus includes: providing a first non-sinusoidal wave to a plasma electrode of the stage; and providing a second non-sinusoidal wave to an edge electrode of the stage. A duty ratio of the second non-sinusoidal wave is different from a duty ratio of the first non-sinusoidal wave.

Abstract: A substrate support according to an embodiment includes: a body portion that has a substrate disposition surface at an upper portion thereof; an RF electrode that is disposed inside the body portion; a heater electrode that is disposed below the RF electrode; and a shaft that is formed on a lower portion surface disposed at an opposite side of the substrate disposition surface and has a hollow.

Abstract: A sound-absorbing air duct for a vehicle includes a lower non-woven fabric and an upper non-woven fabric sandwiching wires therebetween; and a film made of a polyester resin having a low melting point and disposed on the upper non-woven fabric, wherein each of the lower and upper non-woven fabrics includes a mixture between a first polyester fiber containing a polyester resin having a melting point higher than 250° C. and a second polyester fiber containing a polyester resin having a low melting point and having a softening point of 100° C. to 150° C., wherein the second polyester fiber includes a polyester resin having a low melting point composed of: an acid component including terephthalic acid or an ester-forming derivative thereof; and a diol component including 2-methyl-1,3-propanediol, 2-methyl-1,3-pentanediol, and ethylene glycol.

Abstract: A plasma treatment apparatus includes a light generator that generates light, a chamber that receives the light generated from the light generator, an optical element provided between the light generator and the chamber, a light detector that detects the light reflected in the chamber, and a controller connected to the light generator and the light detector. The chamber includes an electrostatic chuck provided in a lower portion of the chamber, an edge ring provided around the electrostatic chuck, an outer wall for sealing an inner space of the chamber, and a gas supply that injects a process gas into the chamber. The optical element branches the generated light to irradiate branched light to different regions of the chamber.

Abstract: A substrate processing apparatus including the controller are provided. The controller includes: a signal analyzer configured to detect at least one of an amplitude, phase, and frequency of a first signal, which is provided to a chamber; a radio frequency (RF) signal generator configured to generate an RF signal with a natural frequency based on a power of the first signal; a harmonic controller configured to generate a second signal based on the power of the first signal and at least one of the amplitude, phase, and frequency of the first signal, the second signal having a different amplitude, a different phase, and/or a different frequency from the RF signal; an operator configured to perform an operation on the RF signal and the second signal; and a filter configured to generate an RF control signal by filtering an output signal of the operator.

Abstract: The present invention relates to a polyester resin for an adhesive strength-improved binder and a polyester fiber using the same, in which adhesive properties of the polyester resin for the adhesive strength-improved binder are not lowered at high temperatures since melt viscosity even at high temperatures of the polyester resin for the adhesive strength-improved binder, as a polyester resin for a binder, the polyester resin including terephthalic acid or an ester-forming derivative thereof as an acid component and including 2-methyl-1,3-propanediol, 2-methyl-1,3-pentanediol, and ethylene glycol as diol components, is not greatly lowered.

Abstract: A substrate processing apparatus is provided. The substrate processing apparatus includes a chamber comprising a support, the support configured to have mounted thereon a substrate; at least one channel disposed in the chamber and into which a conductive fluid or a non-conductive fluid is configured to be injected; and a control unit. The control unit includes a first pump and a second pump configured to respectively supply the conductive fluid and the non-conductive fluid to the at least one channel; and a first valve configured to receive the conductive fluid and the non-conductive fluid from the first pump and the second pump, respectively, and control proportions at which the conductive fluid and the non-conductive fluid are injected into the at least one channel.

Abstract: A display apparatus includes a blue light emitting element configured to emit blue light; a red light emitting element configured to emit red light; and a green light emitting element configured to emit green light. The blue light emitting element may include a first light emitting diode configured to emit light having a maximum intensity at a wavelength shorter than a blue wavelength; and a blue filter configured to transmit light having the blue wavelength.

Abstract: A plasma treatment apparatus includes a light generator that generates light, a chamber that receives the light generated from the light generator, an optical element provided between the light generator and the chamber, a light detector that detects the light reflected in the chamber, and a controller connected to the light generator and the light detector. The chamber includes an electrostatic chuck provided in a lower portion of the chamber, an edge ring provided around the electrostatic chuck, an outer wall for sealing an inner space of the chamber, and a gas supply that injects a process gas into the chamber. The optical element branches the generated light to irradiate branched light to different regions of the chamber.

Abstract: The present invention relates to a polyester resin for an adhesive strength-improved binder and a polyester fiber using the same, in which adhesive properties of the polyester resin for the adhesive strength-improved binder are not lowered at high temperatures since melt viscosity even at high temperatures of the polyester resin for the adhesive strength-improved binder, as a polyester resin for a binder, the polyester resin including terephthalic acid or an ester-forming derivative thereof as an acid component and including 2-methyl-1,3-propanediol, 2-methyl-1,3-pentanediol, and ethylene glycol as diol components, is not greatly lowered.

Abstract: According to an aspect disclosed, there is provided a display apparatus and a manufacturing method capable of maintaining color conversion efficiency and simultaneously expanding a color gamut by emitting light of two wavelengths to one light source. A display apparatus includes a light source configured to emit signal light having a first peak center wavelength and excitation light having a second peak center wavelength shorter than the first peak center wavelength; and a converter configured to convert color of the excitation light emitted by the light source. The light source may be configured to include at least one single chip in which a first semiconductor layer emitting the excitation light and a second semiconductor layer emitting the signal light are arranged in a horizontal or vertical direction.

Abstract: In a method of testing an interconnection substrate, a blocking condition of a reference light reflected from a probe having an intrinsic optical characteristic may be set. An electric field emitted from a test interconnection substrate having a plurality of circuits may change the intrinsic optical characteristics of the probe into test optical characteristics. Light may be irradiated to the probe having the test optical characteristics. The reference light reflected from the probe having the test optical characteristic may be blocked in accordance with the blocking condition. The remaining reflected light that may be due to an abnormal circuit may be detected.

Abstract: An apparatus for testing a wiring circuit includes: a circuit substrate having wirings in the circuit substrate and pads on an upper surface of the circuit substrate and connected to the wirings; an electrode below a lower surface of the circuit substrate; an optical sensor above the upper surface of the circuit substrate and configured to detect a signal emitted from the upper surface of the circuit substrate; and an optical unit above the optical sensor and configured to irradiate light, wherein the optical sensor includes: an optical substrate whose optical characteristics are changed by the signal emitted from the upper surface of the circuit substrate; and a patterned reflective layer on a surface of the optical substrate facing the circuit substrate, the patterned reflective layer having a first region reflecting light incident on the optical substrate and a second region transmitting the light incident on the optical substrate.

Abstract: The present invention relates to a nonwoven fabric for cabin air filter including a low melting point polyester fiber, in which the nonwoven fabric for cabin air filter includes a first polyester fiber containing a polyester resin having a melting point higher than 250° C. and a second polyester fiber containing a low melting point polyester resin having a softening point of 100 to 150° C., the first polyester fiber is a modified cross-sectional yarn having a roundness of 50 to 80%, the second polyester fiber includes a low melting point polyester resin which is formed from an acid component included of terephthalic acid or ester-forming derivatives thereof, and a diol component included of 2-methyl-1,3-propanediol, 2-methyl-1,3-pentanediol, and ethylene glycol, and the second polyester fiber contains illite particles, i.e., micaceous mineral, or a mixture of the illite particles and sericite particles, and silver-based inorganic antibacterial agent particles.

Abstract: An interconnect circuit testing apparatus including: an electric signal generating circuit for generating an electric signal; a first electrode arranged at a first region of a substrate, wherein the substrate includes an interconnect circuit, an upper surface and a lower surface; a second electrode arranged at a second region of the substrate; and a sensor for detecting an electric field emitted from the first region or the second region when the electric signal is applied to the substrate through the first electrode and the second electrode.

Abstract: A sound-absorbing air duct for a vehicle includes a lower non-woven fabric and an upper non-woven fabric sandwiching wires therebetween; and a film made of a polyester resin having a low melting point and disposed on the upper non-woven fabric, wherein each of the lower and upper non-woven fabrics includes a mixture between a first polyester fiber containing a polyester resin having a melting point higher than 250° C. and a second polyester fiber containing a polyester resin having a low melting point and having a softening point of 100° C. to 150° C., wherein the second polyester fiber includes a polyester resin having a low melting point composed of: an acid component including terephthalic acid or an ester-forming derivative thereof; and a diol component including 2-methyl-1,3-propanediol, 2-methyl-1,3-pentanediol, and ethylene glycol.

Abstract: A semiconductor device including a signal generator and decoding and timing skew adjusting circuit is provided. The signal generator is configured to receive n multi-level signals having m signal levels and convert the n multi-level signals into n*(m?1) single level signals having two signal levels. The decoding and timing skew adjusting circuit is configured to receive the single level signals, perform a predefined operation on the single level signals to generate an output signal, and compensate for timing skew between the n multi-level signals, using the single level signals. The n and m are natural numbers, where n>=2 and m>=3.

Abstract: A clutch control apparatus includes: a judder extractor for extracting a judder component based on a speed of a transmission input shaft; an anti-judder signal generator for generating a basic control signal, which is a reverse phase signal to the judder component, based on the judder component extracted by the judder extractor; a signal separator for separating an amplitude and a phase of the basic control signal received from the anti-judder signal generator; and a signal post-processing device for respectively adjusting the amplitude and the phase output from the signal separator and then combining the same together to output anti-judder torque.