Patents by Inventor Sunil Kumar Jindal

Sunil Kumar Jindal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing with enhanced uniformity
    Patent number: 8371904
    Abstract: A polishing head is presented. The polishing head includes a housing having top and bottom surfaces. The housing is formed from a single piece of material. The polishing head includes grooves disposed on the bottom surface and an inlet in communication with the grooves for coupling to a pressure medium supply to supply a pressure medium to the grooves. The pressure medium when supplied to the grooves exerts pressure on a template when attached to the bottom surface to provide back side pressure on a back surface of an article when temporally attached to the template.
    Type: Grant
    Filed: August 8, 2008
    Date of Patent: February 12, 2013
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Sunil Kumar Jindal, Arun Kumar Gupta
  • POLISHING WITH ENHANCED UNIFORMITY
    Publication number: 20100035527
    Abstract: A polishing head is presented. The polishing head includes a housing having top and bottom surfaces. The housing is formed from a single piece of material. The polishing head includes grooves disposed on the bottom surface and an inlet in communication with the grooves for coupling to a pressure medium supply to supply a pressure medium to the grooves. The pressure medium when supplied to the grooves exerts pressure on a template when attached to the bottom surface to provide back side pressure on a back surface of an article when temporally attached to the template.
    Type: Application
    Filed: August 8, 2008
    Publication date: February 11, 2010
    Applicant: CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
    Inventors: Sunil Kumar JINDAL, Arun Kumar GUPTA