Patents by Inventor Sunwoong Yim

Sunwoong Yim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for treating substrate
    Patent number: 9508541
    Abstract: Provided is a substrate treatment apparatus. The substrate treatment apparatus includes a load port on which a carrier accommodating a plurality of substrates to which a back-ground wafer is attached to a mounting tape fixed to a frame ring is placed, a plasma treatment unit supplying plasma to treat a top surface of the wafer, and a substrate transfer unit transferring the substrate between the carrier and the plasma treatment unit.
    Type: Grant
    Filed: January 2, 2014
    Date of Patent: November 29, 2016
    Assignee: PSK INC.
    Inventors: Jongjin Lee, Bum Joon Park, Tae Hoon Kim, Chang Weon Lee, Sunwoong Yim, Han Kyu Lee
  • APPARATUS AND METHOD FOR TREATING SUBSTRATE
    Publication number: 20140190513
    Abstract: Provided is a substrate treatment apparatus. The substrate treatment apparatus includes a load port on which a carrier accommodating a plurality of substrates to which a back-ground wafer is attached to a mounting tape fixed to a frame ring is placed, a plasma treatment unit supplying plasma to treat a top surface of the wafer, and a substrate transfer unit transferring the substrate between the carrier and the plasma treatment unit.
    Type: Application
    Filed: January 2, 2014
    Publication date: July 10, 2014
    Inventors: Jongjin Lee, Bum Joon Park, Tae Hoon Kim, Chang Weon Lee, Sunwoong Yim, Han Kyu Lee