Abstract: Electrostatic chucks and methods for forming electrostatic chucks are provided. A method comprises obtaining a substrate comprising an etch resistant coating layer; ablating, with a laser, the etch resistant coating layer so as to remove at least a portion of the etch resistant coating layer so as to provide one or more exposed portions of the substrate; and forming an electrostatic chuck, wherein, when measuring an electrical resistance across the one or more exposed portions of the substrate between two metallized portions, the electrostatic chuck exhibits an electrical isolation of 300 G? or more. An electrostatic chuck comprises a substrate having at least one etch resistant coating layer comprising a laser ablated pattern, wherein the laser ablated pattern comprises one or more exposed portions of the substrate spanning distances of at least 0.5 mm.

Abstract: A method of making an electrode useable in an electrochemical cell, includes the steps of (a) providing an electrically conductive substrate; (b) forming nanostructured current collectors on the conductive substrate; and (c) attaching nanoparticles of a ternary orthosilicate composite to the nanostructured current collectors. The ternary orthosilicate composite includes Li2MnxFeyCozSiO4, where x+y+z=1.

Abstract: In one aspect of the present invention, an electrode useable in an electrochemical cell includes an electrically conductive substrate, nanostructured current collectors in electrical contact with the conductive substrate, and nanoparticles of a ternary orthosilicate composite coated on the nanostructured current collectors. The ternary orthosilicate composite comprises Li2MnxFeyCozSiO4, where x+y+z=1.

Abstract: In one aspect of the present invention, an electrode useable in an electrochemical cell includes an electrically conductive substrate, nanostructured current collectors in electrical contact with the conductive substrate, and nanoparticles of a ternary orthosilicate composite coated on the nanostructured current collectors. The ternary orthosilicate composite comprises Li2MnxFeyCozSiO4, where x+y+z=1.

Abstract: In one aspect of the present invention, an ultracapacitor has a first plate, a second plate and a separator sandwiched between the first plate and the second plate. Each of the first plate and the second plate includes a substrate, first nanostructures formed on the substrate, and second nanostructures, being different from the first nanostructures, attached to the first nanostructures. The first nanostructures include carbon nanotubes (CNTs) or carbon fibers/nanofibers (CFs). The second nanostructures include nano-particles of an active material including MnO2.