Patents by Inventor Surguru ITOI

Surguru ITOI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ION BEAM IRRADIATION APPARATUS AND METHOD
    Publication number: 20240030004
    Abstract: An ion beam irradiation apparatus includes a plasma generation container in which plasma is generated, a vaporizer connected to the plasma generation container, a halogen gas supply passage through which a halogen gas is supplied to the vaporizer, an air supply passage through which air is supplied to the vaporizer, and an evacuation passage through which a reaction product produced through a reaction between the halogen gas and the air is evacuated to an outside of the ion beam irradiation apparatus.
    Type: Application
    Filed: July 17, 2023
    Publication date: January 25, 2024
    Applicant: Nissin Ion Equipment Co., Ltd.
    Inventors: Yuta IWANAMI, Yuya HIRAI, Surguru ITOI