Patents by Inventor Suri Hedge

Suri Hedge has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of monitoring introduction of interfacial species
    Patent number: 7335969
    Abstract: A method for monitoring a nitridation process, including: (a) providing a semiconductor substrate; (b) forming a first dielectric layer on a top surface of the substrate; (c) introducing a quantity of interfacial species into the substrate; (d) removing the first dielectric layer; (e) forming a second dielectric layer on the top surface of the substrate; (f) measuring the density of interface traps between the substrate and the second dielectric layer; (g) providing a predetermined relationship between the quantity of the interfacial species and the density of the interface traps; and (h) determining the quantity of the interfacial species introduced based on the relationship.
    Type: Grant
    Filed: March 9, 2005
    Date of Patent: February 26, 2008
    Assignee: International Business Machines Corporation
    Inventors: Lance Genicola, Mark J. Hurley, Jeremy J. Kempisty, Paul D. Kirsch, Ravikumar Ramachandran, Suri Hedge
  • Method of monitoring introduction on interfacial species
    Patent number: 6929964
    Abstract: A method for monitoring a nitridation process, including: (a) providing a semiconductor substrate; (b) forming a first dielectric layer on a top surface of the substrate; (c) introducing a quantity of interfacial species into the substrate; (d) removing the first dielectric layer; (e) forming a second dielectric layer on the top surface of the substrate; (f) measuring the density of interface traps between the substrate and the second dielectric layer; (g) providing a predetermined relationship between the quantity of the interfacial species and the density of the interface traps; and (h) determining the quantity of the interfacial species introduced based on the relationship.
    Type: Grant
    Filed: September 17, 2003
    Date of Patent: August 16, 2005
    Assignee: International Business Machines Corporation
    Inventors: Lance Genicola, Mark J. Hurley, Jeremy J. Kempisty, Paul D. Kirsch, Ravikumar Ramachandran, Suri Hedge
  • Method of monitoring introduction of interfacial species
    Publication number: 20050153467
    Abstract: A method for monitoring a nitridation process, including: (a) providing a semiconductor substrate; (b) forming a first dielectric layer on a top surface of the substrate; (c) introducing a quantity of interfacial species into the substrate; (d) removing the first dielectric layer; (e) forming a second dielectric layer on the top surface of the substrate; (f) measuring the density of interface traps between the substrate and the second dielectric layer; (g) providing a predetermined relationship between the quantity of the interfacial species and the density of the interface traps; and (h) determining the quantity of the interfacial species introduced based on the relationship.
    Type: Application
    Filed: March 9, 2005
    Publication date: July 14, 2005
    Inventors: Lance Genicola, Mark Hurley, Jeremy Kempisty, Paul Kirsch, Ravikumar Ramachandran, Suri Hedge
  • METHOD OF MONITORING INTRODUCTION ON INTERFACIAL SPECIES
    Publication number: 20050059225
    Abstract: A method for monitoring a nitridation process, including: (a) providing a semiconductor substrate; (b) forming a first dielectric layer on a top surface of the substrate; (c) introducing a quantity of interfacial species into the substrate; (d) removing the first dielectric layer; (e) forming a second dielectric layer on the top surface of the substrate; (f) measuring the density of interface traps between the substrate and the second dielectric layer; (g) providing a predetermined relationship between the quantity of the interfacial species and the density of the interface traps; and (h) determining the quantity of the interfacial species introduced based on the relationship.
    Type: Application
    Filed: September 17, 2003
    Publication date: March 17, 2005
    Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION, INFINEON TECHNOLOGIES NORTH AMERICA CORP
    Inventors: Lance Genicola, Mark Hurley, Jeremy Kempisty, Paul Kirsch, Ravikumar Ramachandran, Suri Hedge