Patents by Inventor Suribabu CHELIBONI

Suribabu CHELIBONI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PICK-UP CHUCK WITH GAS BEARING STRUCTURE
    Publication number: 20230321843
    Abstract: A pick-up chuck for handling a substrate has a chuck body defining a support surface, a gas relay aperture for transmitting a gas, a vacuum aperture portion configured in use to generate a vacuum force to pick up the substrate, and a flow of said gas through the gas relay aperture onto the said support surface towards the vacuum aperture portion. A gas bearing structure arranged on said support surface is shaped to provide a gas bearing between the substrate and said support surface by utilizing the flow of said gas between the gas relay aperture and the vacuum aperture portion.
    Type: Application
    Filed: April 11, 2022
    Publication date: October 12, 2023
    Inventors: Suribabu CHELIBONI, Ka Shing KWAN, Naveen Kumar GUPTA