Abstract: A device is described for latching an actuator to a substrate where the substrate includes a thermally activated material located on the substrate and a heater capable of heating the thermally activated material until it softens. The actuator includes a contact area that is spaced above the thermally activated material in a non-contact position. The actuator is movable from the non-contact position to a contact position where the contact area contacts the thermally activated material of the substrate. A method of latching actuator is also provided including heating the thermally activated material until it softens and moving an actuator into the contact position.

Abstract: A microelectromechanical relay and a method of fabricating the same that combines electrostatic actuation with electromagnetic actuation. The relay has very low contact resistance when the relay is in its ON state and enhanced contact-to-contact isolation when the relay is in its OFF state. The relay includes a substrate having a trench formed therein, a first pair of contacts located in the trench and an actuator for controllably establishing electrical contact between the first pair of contacts. The actuator includes spaced apart supports on the substrate and a movable beam extending between the supports. A contact cross bar is located on the movable beam facing the first pair of contacts. A first electrode is located on the movable beam and a second electrode is located on the substrate. Electromagnetic force is used to deflect the movable beam towards the substrate and then electrostatic force is used to bring the contact cross bar in physical contact with the first pair of contacts.

Abstract: A device is described for latching an actuator to a substrate where the substrate includes a thermally activated material located on the substrate and a heater capable of heating the thermally activated material until it softens. The actuator includes a contact area that is spaced above the thermally activated material in a non-contact position. The actuator is movable from the non-contact position to a contact position where the contact area contacts the thermally activated material of the substrate. A method of latching actuator is also provided including heating the thermally activated material until it softens and moving an actuator into the contact position.

Abstract: A microrelay device is described including a substrate with a first pair of contacts, a ferromagnetic material and a conductive coil surrounding the ferromagnetic material. The microrelay also includes an actuator having a permanent magnet and a contact area. The actuator is fixed at a first end and movable between a first position and a second position. The contact area of the actuator is spaced from the pair of contacts on the substrate in the first position and in contact with the first pair of contacts on the substrate in the second position. A method of fabricating a microrelay device is also described including forming a conductive coil embedded in an insulating material.

Abstract: A micorelectromechanical relay and a method of fabricating the same that combines electrostatic actuation with electromagnetic actuation. The relay has very low contact resistance when the relay is in its ON state and enhanced contact-to-contact isolation when the relay is in its OFF state.

Abstract: A method of fabricating a tapered fiber having a hemispheric end i.e. TH fiber, is provided. The TH fiber has high coupling efficiency and low coupling loss, while providing good reproducibility and ease of fabrication. The TH fiber is adapted for MEMS-based switch applications. Also, a method of measuring a beam profile of a fiber is provided. The beam profile measuring technique allows for easy control and manipulation of the fabrication process of the TH fiber.