Patents by Inventor Susan Eileen Shore

Susan Eileen Shore has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor device with non-deposited barrier layer
    Patent number: 5940725
    Abstract: A semiconductor device comprises a semiconductor substrate of a first conductivity type, a first conductive layer formed in the semiconductor substrate using a dopant, and being of a second conductivity type, a silicon-rich nitride film formed on the first conductive layer, and a second conductive layer formed on the silicon-rich nitride film, wherein the silicon-rich nitride film inhibits outdiffusion of dopant from the first conductive layer into the second conductive layer, and blocks interdiffusion between the second conductive layer and the first conductive layer.
    Type: Grant
    Filed: August 14, 1997
    Date of Patent: August 17, 1999
    Assignee: International Business Machines Corporation
    Inventors: Thomas Hunter, Joseph M. Morton, Susan Eileen Shore, Anthony J. Yu