Patents by Inventor Susan Tover

Susan Tover has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Physical vapor deposition of nickel
    Patent number: 6806172
    Abstract: Nickel film formation is implemented by heating a deposition chamber during deposition of nickel on a substrate or between processing of two or more substrates or both. Embodiments include forming a nickel silicide on a composite having an exposed silicon surface by introducing the substrate to a PVD chamber having at least one heating element for heating the chamber and depositing a layer of nickel directly on the exposed silicon surface of the composite while concurrently heating the chamber with the heating element.
    Type: Grant
    Filed: April 5, 2001
    Date of Patent: October 19, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Christy Mei-Chu Woo, Eric N. Paton, Susan Tover