Patents by Inventor Susanna R. Carbaugh

Susanna R. Carbaugh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Selective and anisotropic dry etching
    Patent number: 4734157
    Abstract: A composition and method for anistropically etching polysilicon or silicides with excellent selectivity to an underlying layer of an oxide or nitride of silicon is disclosed. A mixture of CClF.sub.3 or CCl.sub.2 F.sub.2 and ammonia is employed at moderate pressures in a reactive ion etching chamber.
    Type: Grant
    Filed: March 18, 1987
    Date of Patent: March 29, 1988
    Assignee: International Business Machines Corporation
    Inventors: Susanna R. Carbaugh, Hung Y. Ng, Murty S. Polavarapu, David Stanasolovich