Patents by Inventor Susanne Grabmeier

Susanne Grabmeier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Physical vapor deposition target constructions
    Patent number: 7618520
    Abstract: The invention includes a target construction having a sputtering region and a flange region laterally outward relative to the sputtering region. The flange region has a front surface disposed on a front face of the construction and a back surface opposing the front surface. An o-ring groove is disposed within the flange region. The o-ring groove has a planar base surface which has a first width and has an orifice disposed along the front surface of the flange. The orifice has a second width as measured parallel relative to the base surface. The second width is greater than the first width. The flange surfaces can additionally be protected from rubbing by a layer of protective material.
    Type: Grant
    Filed: September 23, 2005
    Date of Patent: November 17, 2009
    Assignee: Honeywell International Inc.
    Inventors: Chi tse Wu, Stephane Ferrasse, Frank C. Alford, Susanne Grabmeier, Werner H. Hort, Jaeyeon Kim, Susan D. Strothers, Andrew Wragg, Robert Prater
  • Physical vapor deposition target constructions
    Publication number: 20060070876
    Abstract: The invention includes a target construction having a sputtering region and a flange region laterally outward relative to the sputtering region. The flange region has a front surface disposed on a front face of the construction and a back surface opposing the front surface. An o-ring groove is disposed within the flange region. The o-ring groove has a planar base surface which has a first width and has an orifice disposed along the front surface of the flange. The orifice has a second width as measured parallel relative to the base surface. The second width is greater than the first width. The flange surfaces can additionally be protected from rubbing by a layer of protective material.
    Type: Application
    Filed: September 23, 2005
    Publication date: April 6, 2006
    Inventors: Chi Wu, Stephane Ferrasse, Frank Alford, Susanne Grabmeier, Werner Hort, Jaeyeon Kim, Susan Strothers, Andrew Wragg, Robert Prater