Patents by Inventor Sushant Suresh Koshti

Sushant Suresh Koshti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Gas-pulsing-based shared precursor distribution system and methods of use
    Patent number: 11520358
    Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
    Type: Grant
    Filed: November 8, 2021
    Date of Patent: December 6, 2022
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu, Marcel E. Josephson, Sushant Suresh Koshti, Kenneth Le, Kevin M. Brashear
  • Gas-Pulsing-Based Shared Precursor Distribution System And Methods Of Use
    Publication number: 20220075396
    Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
    Type: Application
    Filed: November 8, 2021
    Publication date: March 10, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu, Marcel E. Josephson, Sushant Suresh Koshti, Kenneth Le, Kevin M. Brashear
  • Gas-pulsing-based shared precursor distribution system and methods of use
    Patent number: 11169547
    Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
    Type: Grant
    Filed: April 27, 2019
    Date of Patent: November 9, 2021
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu, Marcel E. Josephson, Sushant Suresh Koshti, Kenneth Le, Kevin M. Brashear
  • Gas-Pulsing-Based Shared Precursor Distribution System and Methods of Use
    Publication number: 20190332129
    Abstract: Gas distribution apparatus to provide uniform flows of gases from a single source to multiple processing chambers are described. A regulator is positioned at an upstream end of a shared volume having a plurality of downstream ends. A flow controller is positioned at each downstream end of the shared volume, the flow controller comprising an orifice and a fast pulsing valve. Methods of using the gas distribution apparatus and calibrating the flow controllers are also described.
    Type: Application
    Filed: April 27, 2019
    Publication date: October 31, 2019
    Inventors: Michael Rice, Joseph AuBuchon, Sanjeev Baluja, Ashley M. Okada, Alexander Fernandez, Ming Xu, Marcel E. Josephson, Sushant Suresh Koshti, Kenneth Le, Kevin M. Brashear