Abstract: Various embodiments include apparatuses to provides an in-situ, non-intrusive verification of substrate pin-lifters while a substrate is in a substrate-processing location on a process tool. The disclosed subject matter can also verify any unexpected substrate movement prior to or while the substrate is being removed from the process tool. In an exemplary embodiment, a pin-lifter test substrate includes a number of motion sensors and at least one force sensor. The motion sensors including at least one type of sensor selected from sensor types including inclinometers and accelerometers. A memory device on the pin-lifter test substrate records data received from the motion sensors. Instead of or in addition to the memory device, a wireless communications device transmits data received from the motion sensors to a remote receiver. Other apparatuses and systems are disclosed.

Abstract: Grip management includes determining, using first changes of capacitance of a sensing region of an input device, a first signal level corresponding to a first input object satisfying a size threshold and being proximate to a first side of the input device at a first time, and determining a first signal level threshold based on the first signal level. The grip management further includes determining, using second changes of capacitance of the sensing region, a second signal level corresponding to the first input object being proximate to the first side of the input device at a second time, and detecting a squeeze of the input device based at least in part on the second signal level satisfying the first signal level threshold.

Abstract: Grip management includes determining, using first changes of capacitance of a sensing region of an input device, a first signal level corresponding to a first input object satisfying a size threshold and being proximate to a first side of the input device at a first time, and determining a first signal level threshold based on the first signal level. The grip management further includes determining, using second changes of capacitance of the sensing region, a second signal level corresponding to the first input object being proximate to the first side of the input device at a second time, and detecting a squeeze of the input device based at least in part on the second signal level satisfying the first signal level threshold.