Patents by Inventor Sushil Padlyar

Sushil Padlyar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Light source for photolithography
    Publication number: 20050225740
    Abstract: A hybrid light source for photolithography is disclosed. According to an embodiment of the invention, a light source comprises, a head, a first set of poles coupled to the head, the first set of poles are located approximately at an outer edge of the head, and a second set of poles coupled to the head located between the outer edge and a center of the head. According to a further embodiment of the invention, the poles are adjustable to change the characteristics of the light source.
    Type: Application
    Filed: March 31, 2004
    Publication date: October 13, 2005
    Inventors: Sushil Padlyar, Hsuen Yang, Everett Lee