Patents by Inventor Susumu Isago

Susumu Isago has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8836252
    Abstract: An exemplary piezoelectric actuator includes a piezoelectric transducer that exhibits displacements when energized with corresponding voltages. A control system is electrically connected to the piezoelectric transducer so as to provide the transducer with the voltages. The control system includes feedback of displacements of the transducer as functions of respective voltage commands and feed-forward of electrical currents passing through the transducer as functions of the respective voltages applied to the transducer. The control system further has a feedback controller connected to receive transducer-displacement data corresponding to the voltages applied to the transducer. The control system further can include a current-feed-forward amplifier connected to receive transducer-current data corresponding to the voltages applied to the transducer. Such a control system facilitates reduction of hysteresis in controlled actuation of the actuator.
    Type: Grant
    Filed: October 22, 2012
    Date of Patent: September 16, 2014
    Assignee: Nikon Corporation
    Inventors: Yi-Ping Hsin, Susumu Isago, Bausan Yuan
  • Publication number: 20140055060
    Abstract: An exemplary piezoelectric actuator includes a piezoelectric transducer that exhibits displacements when energized with corresponding voltages. A control system is electrically connected to the piezoelectric transducer so as to provide the transducer with the voltages. The control system includes feedback of displacements of the transducer as functions of respective voltage commands and feed-forward of electrical currents passing through the transducer as functions of the respective voltages applied to the transducer. The control system further has a feedback controller connected to receive transducer-displacement data corresponding to the voltages applied to the transducer. The control system further can include a current-feed-forward amplifier connected to receive transducer-current data corresponding to the voltages applied to the transducer. Such a control system facilitates reduction of hysteresis in controlled actuation of the actuator.
    Type: Application
    Filed: October 22, 2012
    Publication date: February 27, 2014
    Applicant: Nikon Corporation
    Inventors: Yi-Ping Hsin, Susumu Isago, Bausan Yuan
  • Patent number: 8619361
    Abstract: Methods and apparatus for providing vibration compensation using position measurements are disclosed. According to one aspect of the present invention, a method of compensating for vibrations of an object includes obtaining a plurality of position measurements associated with the object. The method also includes processing the plurality of position measurements to determine a derivative acceleration, and determining a compensatory force to counteract the vibrations of the object. Determining the compensatory force includes using the derivative acceleration. Finally, the method includes applying the compensatory force to the object.
    Type: Grant
    Filed: March 31, 2010
    Date of Patent: December 31, 2013
    Assignee: Nikon Corporation
    Inventors: Yi-Ping Hsin, Susumu Isago, Kazuo Masaki, Bausan Yuan
  • Publication number: 20110242660
    Abstract: Methods and apparatus for providing vibration compensation using position measurements are disclosed. According to one aspect of the present invention, a method of compensating for vibrations of an object includes obtaining a plurality of position measurements associated with the object. The method also includes processing the plurality of position measurements to determine a derivative acceleration, and determining a compensatory force to counteract the vibrations of the object. Determining the compensatory force includes using the derivative acceleration. Finally, the method includes applying the compensatory force to the object.
    Type: Application
    Filed: March 31, 2010
    Publication date: October 6, 2011
    Inventors: Yi-Ping Hsin, Susumu Isago, Kazuo Masaki, Bausan Yuan