Abstract: Conductive member 31 comprises a plurality of conductive nitride layers 32 and at least one nitride-metal layer 33 that includes a conductive nitride and a metal. The conductive nitride layers 32 and the at least one nitride-metal layer 33 are alternately stacked. Nitride-metal layer 33 includes metal dispersion layer 33A in which the metal is dispersed in the conductive nitride.

Abstract: A method for manufacturing an electronic device includes a stretchable member attachment step of attaching stretchable member 21 to first substrate 2 on which second substrate 3 is stacked, a first modification line formation step of forming one or more first modification lines 22 by irradiating the first substrate 2 with a laser beam, and a dividing step of stretching the stretchable member 21 to divide the first substrate 2 along the one or more first modification lines 22.

Abstract: A machining system includes: a jig retaining a plurality of workpieces; a measurement device measuring the retained plurality of workpieces; and a machining device machining the retained plurality of workpieces. The jig has a reference part positioned or position detected by the machining device. The measurement device has: a measurement unit measuring a positional relationship of the retained plurality of workpieces relative to the reference part, and an input unit using a recording medium or communication to input measured positional information of the plurality of workpieces to the machining device. The machining device has: a jig coordinate system specifying unit specifying a coordinate system of the jig, by positioning or position measuring the reference part, and a workpiece coordinate system setting unit individually setting coordinate systems of each of the plurality of workpieces, based on the specified coordinate system, and the inputted positional information.

Abstract: To provide a temperature measuring device for a thermal displacement compensation device, in which the values output by temperature sensors are shared among a plurality of machine tools, and thus the total number of the temperature sensors is reduced, thereby suppressing the total cost and also reducing the failure risk of the temperature sensors installed in the machine tools. A plurality of machine tools are made to use, in order to monitor a temperature of each of one or more common positions set in advance, temperature information measured by a temperature sensor installed at any position in the common positions in each of the machine tools, as temperature information of any position in the common positions without a temperature sensor installed in another machine tool in the plurality of machine tools.

Abstract: Provided is a thermal displacement correction device capable of continuing a thermal displacement correction with high accuracy even when some of a plurality of sensors fail. The thermal displacement correction device includes a sensor information acquisition unit that acquires machine tool temperatures detected by the sensor and a state of the sensors, a thermal displacement estimating method storage unit that stores a plurality of thermal displacement estimating methods, a thermal displacement estimating method selection unit that selects a thermal displacement estimating method to be used for estimating the thermal displacement amount of the machine tool based on the state of the sensors, and a thermal displacement estimating unit that estimates the thermal displacement amount of the machine tool based on the machine tool temperature according to the thermal displacement estimating method selected by the thermal displacement estimating method selection unit.

Abstract: To provide an abnormality determination apparatus, a computer readable medium, an abnormality determination system and an abnormality determination method which can simply detect an abnormality of a temperature in a machine tool without incurring cost. An abnormality determination apparatus which determines abnormality of a temperature sensor in a plurality of machine tools, in which the plurality of machine tools is equivalent machine type, is arranged in equivalent environments, are provided with a temperature sensor at equivalent positions, the abnormality determination apparatus including: a temperature data acquisition unit which acquires temperature data outputted by the temperature sensors from each of the plurality of machine tools; a comparison unit which compares the temperature data acquired by the temperature data acquisition unit; and an abnormality determination unit which determines abnormality of the temperature sensor based on a comparison result by the comparison unit.

Abstract: To provide a reference temperature setting device, a reference temperature setting method, and a reference temperature setting program capable of setting an appropriate reference temperature for thermal displacement compensation. A reference temperature setting device comprises: an acquisition unit that acquires measured values from multiple temperature sensors installed on a machine; and a determination unit that determines setting timing for a reference temperature for thermal displacement compensation to coincide with a point in time when the measured values satisfy a predetermined condition.

Abstract: An abnormality determination apparatus, which determines abnormality of a temperature sensor in a machine tool, includes: a temperature pattern storage unit which stores a normal pattern indicating temperature change relative to machining time for a machining classification of the machine tool; a temperature data acquisition unit which acquires temperature data outputted by the temperature sensor provided to the machine tool; a machining classification determination unit which determines a machining classification of the machine tool; a comparison data acquisition unit which extracts the normal pattern relative to a determined machining classification from the temperature pattern storage unit; a comparison unit which compares the extracted normal pattern, and as acquired pattern indicating temperature change relative to machining time according to the acquired temperature data; and an abnormality determination unit which determines abnormality of a temperature sensor based on a comparison result.

Abstract: A machining system according to an aspect of the present disclosure includes: a jig which retains a plurality of workpieces; a measurement device which measures a plurality of workpieces retained on the jig; and a machining device which machines the plurality of workpieces retained on the jig, in which the jig has a reference part which is positioned or position detected by the machining device, and in which the measurement device has: a measurement unit which measures a positional relationship of the plurality of workpieces retained on the jig relative to the reference part, and an input unit which uses a recording medium or communication to input positional information of the plurality of workpieces measured by the measurement unit to the machining device, and in which the machining device has: a jig coordinate system specifying unit which specifies a coordinate system of the jig, by positioning or position measuring the reference part of the jig, and a workpiece coordinate system setting unit which individ

Abstract: A machine learning device that can optimize an equation for estimating a thermal displacement amount of a machine element based on the operating state of the machine element. The device acquires operating state data of the machine element, acquires a measured value for the thermal displacement amount, stores the operating state data and measured values for the thermal displacement amount of the machine element as training data associated together as a label, sets an equation for calculation the thermal displacement amount based on the operating state data, calculates an estimated value for the thermal displacement amount by substituting the operating state data into this equation, determines whether a difference between the estimated value for the thermal displacement amount and the measured value for the thermal displacement amount is no more than a predetermined threshold.

Abstract: To provide a temperature measuring device for a thermal displacement compensation device, in which the values output by temperature sensors are shared among a plurality of machine tools, and thus the total number of the temperature sensors is reduced, thereby suppressing the total cost and also reducing the failure risk of the temperature sensors installed in the machine tools. A plurality of machine tools are made to use, in order to monitor a temperature of each of one or more common positions set in advance, temperature information measured by a temperature sensor installed at any position in the common positions in each of the machine tools, as temperature information of any position in the common positions without a temperature sensor installed in another machine tool in the plurality of machine tools.

Abstract: To provide an abnormality determination apparatus, a computer readable medium, an abnormality determination system and an abnormality determination method which can simply detect an abnormality of a temperature in a machine tool without incurring cost. An abnormality determination apparatus which determines abnormality of a temperature sensor in a plurality of machine tools, in which the plurality of machine tools is equivalent machine type, is arranged in equivalent environments, are provided with a temperature sensor at equivalent positions, the abnormality determination apparatus including: a temperature data acquisition unit which acquires temperature data outputted by the temperature sensors from each of the plurality of machine tools; a comparison unit which compares the temperature data acquired by the temperature data acquisition unit; and an abnormality determination unit which determines abnormality of the temperature sensor based on a comparison result by the comparison unit.

Abstract: An abnormality determination apparatus, which determines abnormality of a temperature sensor in a machine tool, includes: a temperature pattern storage unit which stores a normal pattern indicating temperature change relative to machining time for a machining classification of the machine tool; a temperature data acquisition unit which acquires temperature data outputted by the temperature sensor provided to the machine tool; a machining classification determination unit which determines a machining classification of the machine tool; a comparison data acquisition unit which extracts the normal pattern relative to a determined machining classification from the temperature pattern storage unit; a comparison unit which compares the extracted normal pattern, and as acquired pattern indicating temperature change relative to machining time according to the acquired temperature data; and an abnormality determination unit which determines abnormality of a temperature sensor based on a comparison result.

Abstract: Provided is a thermal displacement correction device capable of continuing a thermal displacement correction with high accuracy even when some of a plurality of sensors fail. The thermal displacement correction device includes a sensor information acquisition unit that acquires machine tool temperatures detected by the sensor and a state of the sensors, a thermal displacement estimating method storage unit that stores a plurality of thermal displacement estimating methods, a thermal displacement estimating method selection unit that selects a thermal displacement estimating method to be used for estimating the thermal displacement amount of the machine tool based on the state of the sensors, and a thermal displacement estimating unit that estimates the thermal displacement amount of the machine tool based on the machine tool temperature according to the thermal displacement estimating method selected by the thermal displacement estimating method selection unit.

Abstract: To provide a reference temperature setting device, a reference temperature setting method, and a reference temperature setting program capable of setting an appropriate reference temperature for thermal displacement compensation. A reference temperature setting device comprises: an acquisition unit that acquires measured values from multiple temperature sensors installed on a machine; and a determination unit that determines setting timing for a reference temperature for thermal displacement compensation to coincide with a point in time when the measured values satisfy a predetermined condition.

Abstract: A thermal displacement correction device for a machine tool that corrects thermal displacement of a spindle unit includes a memory that defines the spindle unit as a two-dimensional model in a thermally symmetrical plane or in a plane parallel to the thermally symmetrical plane, divides the two-dimensional model into regions, and stores a linear expansion coefficient, a heating coefficient and a radiation coefficient corresponding to each region, and a thermal conductivity coefficient between the each region and its adjacent region; a temperature estimating unit that estimates a temperature of the each region; a correction estimating unit; and a thermal displacement correction unit that performs correction in driving a feed shaft to a command position.

Abstract: A machine learning device that can optimize an equation for estimating a thermal displacement amount of a machine element based on the operating state of the machine element. The device acquires operating state data of the machine element, acquires a measured value for the thermal displacement amount, stores the operating state data and measured values for the thermal displacement amount of the machine element as training data associated together as a label, sets an equation for calculation the thermal displacement amount based on the operating state data, calculates an estimated value for the thermal displacement amount by substituting the operating state data into this equation, determines whether a difference between the estimated value for the thermal displacement amount and the measured value for the thermal displacement amount is no more than a predetermined threshold.

Abstract: A thermal displacement correction device for a machine tool is provided with detection result determination unit configured to determine, based on an actual position and a reference position detected by position detection unit, whether or not the actual position is based on correct detection, correction error calculation unit configured to calculate a correction error in the actual position if it is determined that the result of detection is based on correct detection, and correction amount modification unit configured to modify a thermal displacement correction amount based on the correction error.

Abstract: A position command value is compensated by predicting a thermal displacement amount of each part of a machine tool and adding a thermal displacement compensation amount which cancels the predicted thermal displacement amount to the position command value of a feed axis. This thermal displacement compensation amount is adjusted from the error amount between this compensated position command value and an actual machining point. Upon adjustment of this thermal displacement compensation amount, it is possible to determine whether to increase or decrease the thermal displacement amount based on a direction in which an operator moves a tool image or a workpiece image on a screen.

Abstract: A coolant apparatus of a machine tool includes a coolant pump that sends out a coolant from a coolant tank, a controller that drives or stops the coolant pump, and a condition setting unit that sets conditions for driving or stopping the coolant pump. Then, the controller drives or stops the coolant pump based on content set by the condition setting unit.