Abstract: A stocker 1 includes a storage FOUP 20, plural purge units 50, a measurement FOUP 30 and a stacker crane 60. The storage FOUP 20 stores a semiconductor wafer inside. The measurement FOUP 30 includes a flow meter inside. The purge unit 50 includes a purge shelf 51 having plural purge tables 54 for placing the storage FOUP 20, and a nitrogen gas is supplied into the storage FOUP 20 placed on the purge table 54. The stacker crane 60 transports the storage container 20 onto the purge table 54, and the measurement FOUP 30 is transported between the plural purge tables 54.

Abstract: A storage apparatus (1) stores a transported object (220) from a transporting carriage (110), which travels along a track (120) installed on or near a ceiling (210) while gripping the transported object. The storage apparatus is provided with a rack portion (30), on which the transported object is put; and a support member (10), whose upper end is supported by the track or ceiling and whose lower end supports the rack portion. The support member selectively has one of first and second shapes. The first shape allows the transporting carriage to put the transported object onto the rack portion at the predetermined position. The second shape allows the rack portion to move away from a position below the track.

Abstract: A stocker 1 includes a storage FOUP 20, plural purge units 50, a measurement FOUP 30 and a stacker crane 60. The storage FOUP 20 stores a semiconductor wafer inside. The measurement FOUP 30 includes a flow meter inside. The purge unit 50 includes a purge shelf 51 having plural purge tables 54 for placing the storage FOUP 20, and a nitrogen gas is supplied into the storage FOUP 20 placed on the purge table 54. The stacker crane 60 transports the storage container 20 onto the purge table 54, and the measurement FOUP 30 is transported between the plural purge tables 54.

Abstract: A storage apparatus (1) stores a transported object (220) from a transporting carriage (110), which travels along a track (120) installed on or near a ceiling (210) while gripping the transported object. The storage apparatus is provided with a rack portion (30), on which the transported object is put; and a support member (10), whose upper end is supported by the track or ceiling and whose lower end supports the rack portion. The support member selectively has one of first and second shapes. The first shape allows the transporting carriage to put the transported object onto the rack portion at the predetermined position. The second shape allows the rack portion to move away from a position below the track.