Patents by Inventor Susumu Otaguro

Susumu Otaguro has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thermal treatment system for semiconductors
    Patent number: 6988886
    Abstract: A thermal treatment system for semiconductors comprises an outer tube made of silicon carbide, a base hermetically supporting a lower portion of the outer tube, a lid selectively opening and closing an opening formed in a central portion of the base, and a reactor wall surrounding an outer peripheral wall and the like of the outer tube and having a heater provided on an inner side, wherein an annular sealing member and an annular supporting member are interposed between the outer tube and the base, and wherein the supporting member has an effective heat transfer coefficient of 50 to 2,000 W/(m2·K).
    Type: Grant
    Filed: March 26, 2004
    Date of Patent: January 24, 2006
    Assignee: Asahi Glass Company, Limited
    Inventors: Masaaki Takata, Nobuo Kageyama, Susumu Otaguro, Jiro Nishihama
  • Thermal treatment system for semiconductors
    Publication number: 20050053890
    Abstract: A thermal treatment system for semiconductors comprises an outer tube made of silicon carbide, a base hermetically supporting a lower portion of the outer tube, a lid selectively opening and closing an opening formed in a central portion of the base, and a reactor wall surrounding an outer peripheral wall and the like of the outer tube and having a heater provided on an inner side, wherein an annular sealing member and an annular supporting member are interposed between the outer tube and the base, and wherein the supporting member has an effective heat transfer coefficient of 50 to 2,000 W/(m2·K).
    Type: Application
    Filed: March 26, 2004
    Publication date: March 10, 2005
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: Masaaki Takata, Nobuo Kageyama, Susumu Otaguro, Jiro Nishihama
  • Outer tube made of silicon carbide and thermal treatment system for semiconductors
    Publication number: 20040226518
    Abstract: In an outer tube, which is made of silicon carbide, and which has an upper portion closed and a lower portion opened, has the lower portion formed with a tapered portion so as to expand a diameter thereof toward a lower end thereof, and has a flange formed on an outer peripheral side of the lower portion; the following conditions are met:
    Type: Application
    Filed: February 26, 2004
    Publication date: November 18, 2004
    Applicant: ASAHI GLASS COMPANY, LIMITED
    Inventors: Masaaki Takata, Nobuo Kageyama, Susumu Otaguro