Abstract: Exemplary processing methods may include depositing a boron-containing material or a silicon-and-boron-containing material on a substrate disposed within a processing region of a semiconductor processing chamber. The methods may include etching portions of the boron-containing material or the silicon-and-boron-containing material with a chlorine-containing precursor to form one or more features in the substrate. The methods may also include removing remaining portions of the boron-containing material or the silicon-and-boron-containing material from the substrate with a fluorine-containing precursor.

Abstract: An apparatus for detecting misfires in an internal combustion engine that is mounted on a vehicle. A plurality of cylinders is defined in the engine, and a piston accommodated in each cylinder to reciprocate in the cylinder. A crankshaft is connected with the piston, the crankshaft is rotated by the reciprocal movement of the piston. An engine speed sensor is provided for detecting the rotating speed of the crankshaft. An electronic control unit (ECU) computes the deviation of rotating speed of the crankshaft corresponding to each cylinder based on the detected engine speed, and the deviation is proportional to the engine load. The ECU costs a leaning value based on the computed deviation, wherein the learning value is used for detecting the misfires in the engine. A memory is provided for storing the learning value. Several sensors are provided for detecting a running condition of the engine, wherein the condition is included the engine load.

Abstract: An apparatus for testing seal of a fuel vapor treating device that collects fuel vapor generated in a fuel tank and treats the vapor without releasing it into the atmosphere. The treating device is provided with a canister that collects the fuel vapor through a vapor line. A vapor control valve connected to the canister adjusts the flow of fuel vapor directed toward the canister from the tank. A pressure sensor is provide to detect the pressure in the tank. An electronic control unit (ECU) controls the purge control valve and the three-way valve. The ECU counts the number of deviations of the detected pressure when the detected pressure is within a predetermined range. The ECU determines whether the seal is normal or malfunctioning based on the detected pressure when the counted value is smaller than a predetermined value.

Abstract: A fuel vapor treating device that collects fuel vapor produced in a fuel tank and treats the vapor without releasing it into the atmosphere. The treating device is provided with a canister that collects the fuel vapor through a vapor line. A vapor control valve provided in the canister adjusts the flow of fuel vapor directed toward the canister from the tank. A purge line connects the canister to an air intake passage of an engine. The fuel collected in the canister is purged into the air intake passage through the purge line. A purge control valve provided in the purge line adjusts the flow rate of the fuel flowing through the purge line. A three-way valve selectively switches the section which the pressure sensor is connected to between the tank side and the canister side. An electronic control unit (ECU) controls the purge control valve and the three-way valve.

Abstract: The fault diagnostic apparatus of the present invention detects a failure (a leak) of a fuel tank of an engine. In this invention, space above the fuel level in the fuel tank is connected to a canister. The canister contains an adsorbent to adsorb evaporated fuel in the tank to prevent the evaporated fuel from being released to the atmosphere. Valves are provided to the canister to keep the internal pressure of the canister within a predetermined range. A control circuit of the engine employs a pressure sensor to monitor the internal pressure of the fuel tank, and determines whether the fuel tank has failed in accordance with a change in the internal pressure of the fuel tank. Since the change in the fuel level in the fuel tank varies in accordance with the fuel consumption rate, the change in the pressure in the fuel tank also varies in accordance with the fuel consumption rate.

Abstract: In an evaporative emission control system, a canister adsorbs fuel vapor sent from a fuel tank of an engine. The canister is connected to an intake air passage through a purge gas passage and a purge control valve. A control circuit employs a pressure sensor to detect the pressure of the canister when the purge control valve is closed and when the pressure of the canister is stabilized. The control circuit carries out a failure diagnosis based on this pressure. Namely, when the pressure of the canister after it is stabilized deviates from the atmospheric pressure by more than a predetermined reference value, the control circuit determines that the canister has failed, i.e., the canister has a leak. Since the diagnosis can be carried out before starting the engine, the diagnosis can be correctly carried out without affecting the operation of the engine.

Abstract: The evaporative emission control system in the present invention is equipped with a fuel tank and a canister connected to the fuel tank, and a pressure sensor connected to the canister and the fuel tank via a three-way switching valve. The pressure sensor can be selectively connected to the canister and the fuel tank by switching the position of the three-way switching valve. The control circuit, which may consist of a known type of microcomputer, detects failures in the system based on the smoothed pressure values of the canister and the fuel tank. The smoothed pressure value is obtained by smoothing fluctuations of the pressure detected by the pressure sensor. Since the characteristics of the fluctuations of the pressure in the canister and the fluctuations of the pressure in the fuel tank are different, the control circuit changes the degree of smoothing fluctuation when obtaining the smoothed pressure value of the canister and when obtaining the smoothed pressure value of the fuel tank.