Patents by Inventor Suzan L. Auer-Jongepier

Suzan L. Auer-Jongepier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated post-exposure bake track
    Patent number: 8636458
    Abstract: Systems and methods for processing wafers, a combined post expose bake and chill unit, and an interface are disclosed. An exemplary system includes a lithography tool, local track, transfer device, transfer device handler, interface unit, and controller to schedule processing. An exemplary combined post expose bake and chill unit includes an enclosure having an opening in its side, and a bake unit and a chill unit in the enclosure. An exemplary interface includes a plurality of enclosures arranged around robot(s) that transfer wafers among the enclosures, one of the plurality of enclosures being an integrated bake and chill unit.
    Type: Grant
    Filed: June 6, 2007
    Date of Patent: January 28, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Suzan L. Auer-Jongepier, Johannes Onvlee, Petrus R. Bartray, Bernardus A. J. Luttikhuis, Reinder T. Plug, Hubert M. Segers
  • Integrated post-exposure bake track
    Publication number: 20080304940
    Abstract: Systems and methods for processing wafers, a combined post expose bake and chill unit, and an interface are disclosed. An exemplary system includes a lithography tool, local track, transfer device, transfer device handler, interface unit, and controller to schedule processing. An exemplary combined post expose bake and chill unit includes an enclosure having an opening in its side, and a bake unit and a chill unit in the enclosure. An exemplary interface includes a plurality of enclosures arranged around robot(s) that transfer wafers among the enclosures, one of the plurality of enclosures being an integrated bake and chill unit.
    Type: Application
    Filed: June 6, 2007
    Publication date: December 11, 2008
    Inventors: Suzan L. Auer-Jongepier, Johannes Onvlee, Petrus R. Bartray, Bernardus A. J. Luttikhuis, Reinder T. Plug, Hubert M. Segers