Abstract: An electrostatic discharge protection device and a method of making the same. The device includes a device area located on a semiconductor substrate. The device also includes an array of coextensive, laterally spaced fingers located within the device area. Each finger includes an elongate source and an elongate drain separated by an elongate gate. The fingers are electrically connected in parallel for conducting an electrostatic discharge current during an electrostatic discharge event. The device further includes a plurality of body contact regions. A layout of the body contact regions is graded such that a greater number of the body contact regions, larger body contact regions, or both are located towards a periphery of the device area than towards a central part of the device area. The layout of the body contact regions may encourage triggering of the electrostatic discharge protection device within the central part of the device area.

Abstract: An electrostatic discharge protection device and a method of making the same. The device includes a device area located on a semiconductor substrate. The device also includes an array of coextensive, laterally spaced fingers located within the device area. Each finger includes an elongate source and an elongate drain separated by an elongate gate. The fingers are electrically connected in parallel for conducting an electrostatic discharge current during an electrostatic discharge event. The device further includes a plurality of body contact regions. A layout of the body contact regions is graded such that a greater number of the body contact regions, larger body contact regions, or both are located towards a periphery of the device area than towards a central part of the device area. The layout of the body contact regions may encourage triggering of the electrostatic discharge protection device within the central part of the device area.